Image sensor and fabricating method thereof
An image sensor and fabricating method thereof are provided. The image sensor can include differently microlenses formed on a pixel array substrate. The differently shaped microlenses are formed using a phase mask where the light blocking region for each microlens pattern is positioned according to the relative angle of the microlens to a main lens. The phase shift mask results in a dome shaped microlens at a region of the pixel array substrate receiving incident light from the same axis as light incident the main lens and in asymmetrical shaped microlenses with a thicker region in a portion of the microlens farthest from the dome shaped microlens.
1. A fabricating method of an image sensor comprising:
coating a photoresist for a microlens on a pixel array substrate;
forming a lens pattern array, each lens pattern having a step difference therein by exposing and developing the photoresist using an exposure mask; and
reflowing the lens pattern array to form differently shaped microlenses,
wherein the exposure mask is a half tone phase shift mask,
wherein the half tone phase shift mask includes a light blocking area, a partial light transmitting area, and a total light transmitting area for each mask block of the exposure mask.
2. The method according to claim 1 , wherein the mask block for a center of the lens pattern array comprises the light blocking area in a central area of the mask block and the partial light transmitting area around the central area of the mask block.
3. The method according to claim 1 , wherein the mask block for a left portion of the lens pattern array comprises the light blocking area at a left edge of the mask block and the partial light transmitting area at remaining areas of the mask block.
4. The method according to claim 1 , wherein the mask block for a right portion of the lens pattern array comprises the light blocking area at a right edge of the mask block and the partial light transmitting area at remaining areas of the mask block.
5. The method according to claim 1 , wherein a thickness of a microlens edge area of a selected microlens of the microlenses is more thickly formed as the selected microlens is positioned farther away from a central region.
6. The method according to claim 1 , wherein the surface curvature radius of a selected microlens of the microlenses varies by a larger asymmetry as the selected microlens is positioned farther away from a central region.