Apparatus and method for single-sided loading of a furnace or other process station
Solutions permit or facilitate faster and/or easier processing involving loading or unloading of a work module into a process station. For example, the work module may be a processing tube or the like and the process station may be a heating station such as a tube furnace or the like. In one embodiment, the loading is from a single side of a process station. In one embodiment, the work module includes inlets and outlets for fluid flow, with both inlets and outlets being closer toward one side of the work module than the other side.
1. A method comprising:
providing a housing that defines an interior chamber, the housing having a first end and a second end, the second end being an opposite end to the first end, and the housing having a first opening nearer the first end than the second end; and
providing a conduit coupled to the housing, the conduit having a second opening that opens into the interior chamber and a third opening, wherein the third opening is nearer to the first end than to the second end and at least a portion of the conduit extends along a wall of the housing and comprises a surface outside the housing,
wherein a fluid flow is from at least one of the first to the second opening or the second to the first opening, and when the third opening accepts input fluid, the first opening produces output fluid, and when the first opening accepts input fluid, the third opening produces output fluid.
2. The method of claim 1 wherein the fluid flow comprises a gas flow.
3. The method of claim 1 comprising:
inserting the housing into a tube furnace and making connections only to the first and third openings.
4. The method of claim 1 wherein the second opening is an opening of the housing.
5. The method of claim 1 wherein input fluid enters the interior chamber only through at least one of the first or third opening.
6. A method comprising:
providing a housing that defines an interior chamber, the housing having a first end and a second end, the second end being an opposite end to the first end, and the housing having a first opening nearer the first end than the second end; and
providing a conduit coupled to the housing, the conduit having a second opening that opens into the interior chamber and a third opening, wherein the third opening is nearer to the first end than to the second end, and a cross section of at least a portion of the conduit comprises a first wall outside the interior chamber and a second wall forming a surface of the interior chamber, and the second wall and the housing meet at two points of the cross section,
wherein a fluid flow is from at least one of the first to the second opening or the second to the first opening, and when the third opening accepts input fluid, the first opening produces output fluid, and when the first opening accepts input fluid, the third opening produces output fluid.
7. The method of claim 6 wherein the fluid flow comprises a gas flow.
8. The method of claim 6 comprising:
inserting the housing into a tube furnace and making connections only to the first and third openings.
9. The method of claim 6 wherein the second opening is an opening of the housing.
10. The method of claim 6 wherein input fluid enters the interior chamber only through at least one of the first or third opening.
11. A method comprising:
providing a housing that defines an interior chamber, the housing having a first end and a second end, the second end being an opposite end to the first end, and the housing having a first opening nearer the first end than the second end; and
providing a conduit coupled to the housing, the conduit having a second opening that opens into the interior chamber and a third opening, wherein the third opening is nearer to the first end than to the second end,
wherein a fluid flow is from at least one of the first to the second opening or the second to the first opening, and when the third opening accepts input fluid, the first opening produces output fluid, and when the first opening accepts input fluid, the third opening produces output fluid, and the second opening is coupled to the second end of the housing.
12. The method of claim 11 wherein the fluid flow comprises a gas flow.
13. The method of claim 11 comprising:
inserting the housing into a tube furnace and making connections only to the first and third openings.
14. The method of claim 11 wherein input fluid enters the interior chamber only through at least one of the first or third opening.