Layer having functionality, method for forming flexible substrate having the same, and method for manufacturing semiconductor device
View Patent ↗It is an object of the present invention to provide a method for forming a layer having functionality including a conductive layer and a colored layer and a flexible substrate having a layer having functionality with a high yield. Further, it is an object of the present invention to provide a method for manufacturing a semiconductor device that is small-sized, thin, and lightweight. After coating a substrate having heat resistance with a silane coupling agent, a layer having functionality is formed. Then, after attaching an adhesive to the layer having functionality, the layer having functionality is peeled from the substrate. Further, after coating a substrate having heat resistance with a silane coupling agent, a layer having functionality is formed. Then, an adhesive is attached to the layer having functionality. Thereafter, the layer having functionality is peeled from the substrate, and a flexible substrate is attached to the layer having functionality.
1. A method for manufacturing a semiconductor device, comprising the steps of:
forming a first peeling layer comprising a silane coupling agent over a first substrate;
forming a first conductive layer over the first peeling layer;
forming a first insulating layer covering the first conductive layer;
peeling the first conductive layer and the first insulating layer from the first substrate;
attaching a second substrate to the first conductive layer and the first insulating layer;
forming a second peeling layer comprising a silane coupling agent over a third substrate
forming a second conductive layer over the second peeling layer;
forming a second insulating layer covering the second conductive layer;
peeling the second conductive layer and the second insulating layer from the third substrate;
attaching a fourth substrate to the second conductive layer and the second insulating layer;
forming a sealant over the second substrate or the fourth substrate;
coating a region surrounded by the sealant with a liquid crystal material; and
attaching the second substrate having the first conductive layer and the first insulating layer and the fourth substrate having the second conductive layer and the second insulating layer with the sealant.
2. A method for manufacturing a semiconductor device, comprising the steps of:
forming a first peeling layer in which oxygen and silicon are combined and an inactive group is combined with the silicon over a first substrate;
forming a first conductive layer over the first peeling layer;
forming a first insulating layer covering the first conductive layer;
peeling the first conductive layer and the first insulating layer from the first substrate at a portion including the first peeling layer or at a boundary between the first peeling layer and the first conductive layer;
attaching a second substrate to the first conductive layer and the first insulating layer;
forming a second peeling layer in which oxygen and silicon are combined and an inactive group is combined with the silicon over a third substrate;
forming a second conductive layer over the second peeling layer;
forming a second insulating layer covering the second conductive layer;
peeling the second conductive layer and the second insulating layer from the third substrate at a portion including the second peeling layer or at a boundary between the second peeling layer and the second conductive layer;
attaching a fourth substrate to the second conductive layer and the second insulating layer;
forming a sealant over the second substrate or the fourth substrate;
coating a region surrounded by the sealant with a liquid crystal material; and
attaching the second substrate having the first conductive layer and the first insulating layer and the fourth substrate having the second conductive layer and the second insulating layer with the sealant.
3. A method for manufacturing a semiconductor device according to claim 1 , further comprising:
attaching a first adhesive to the first insulating layer after forming the first insulating layer.
4. A method for manufacturing a semiconductor device according to claim 2 , further comprising:
attaching a first adhesive to the first insulating layer after forming the first insulating layer.
5. A method for manufacturing a semiconductor device according to claim 1 , further comprising:
attaching a second adhesive to the second insulating layer after forming the second insulating layer.
6. A method for manufacturing a semiconductor device according to claim 2 , further comprising:
attaching a second adhesive to the second insulating layer after forming the second insulating layer.
7. A method for manufacturing a semiconductor device according to claim 2 , further comprising:
removing a remaining peeling layer after peeling the first conductive layer and the first insulating layer.
8. A method for manufacturing a semiconductor device according to claim 1 , wherein the first conductive layer is a pixel electrode.
9. A method for manufacturing a semiconductor device according to claim 2 , wherein the first conductive layer is a pixel electrode.
10. A method for manufacturing a semiconductor device according to claim 1 , wherein the second conductive layer is an opposite electrode.
11. A method for manufacturing a semiconductor device according to claim 2 , wherein the second conductive layer is an opposite electrode.
12. A method for manufacturing a semiconductor device according to claim 1 , wherein the first peeling layer and the second peeling layer are formed by coating with the silane coupling agent.
13. A method for manufacturing a semiconductor device according to claim 1 , wherein each of the first substrate and the third substrate is a substrate selected from the group consisting of a glass substrate, a quartz substrate, a ceramic substrate, a metal substrate and a silicon wafer.
14. A method for manufacturing a semiconductor device according to claim 2 , wherein each of the first substrate and the third substrate is a substrate selected from the group consisting of a glass substrate, a quartz substrate, a ceramic substrate, a metal substrate and a silicon wafer.
15. A method for manufacturing a semiconductor device according to claim 1 , wherein each of the second substrate and the fourth substrate is a flexible substrate.
16. A method for manufacturing a semiconductor device according to claim 2 , wherein each of the second substrate and the fourth substrate is a flexible substrate.