Sensor and image pickup device
View Patent ↗A sensor for detecting a received electromagnetic wave comprising a first electrode, a second electrode and an amorphous oxide layer interposed between the first electrode and the second electrode.
1. A sensor for detecting a received electromagnetic wave, comprising:
a first electrode;
a second electrode; and
an amorphous oxide layer interposed between the first electrode and the second electrode, wherein the amorphous oxide layer contains at least one of In, Zn or Sn, and wherein the amorphous oxide layer comprises an amorphous oxide whose electron mobility tends to increase with increasing electron carrier concentration.
2. A sensor according to claim 1 , wherein the amorphous oxide layer is a semiconductor layer comprising a metal oxide, wherein the metal is said at least one of In, Zn and Sn.
3. A sensor according to claim 1 , wherein the first electrode has transmissivity with respect to light in a wavelength range to which the amorphous oxide layer is sensitive.
4. A sensor according to claim 1 , wherein the amorphous oxide layer has an organic pigment.
5. A sensor according to claim 1 , wherein the first and second electrodes and the amorphous oxide layer are provided on a flexible substrate and wherein the amorphous oxide layer comprises an amorphous oxide whose electron mobility tends to increase with increasing electron carrier concentration.
6. A sensor according to claim 1 , wherein a plurality of amorphous oxide layers are interposed between the first electrode and the second electrode and wherein the amorphous oxide layer comprises an amorphous oxide whose electron mobility tends to increase with increasing electron carrier concentration.
7. An image pickup device comprising:
a sensor for detecting a received electromagnetic wave according to claim 1 ; and
a field effect transistor for reading a signal from said sensor.
8. An image pickup device according to claim 7 , further comprising an imaging region which includes the sensor and is non-flat.
9. An image pickup device according to claim 7 , wherein the sensor is an X-ray sensor, and the X-ray sensor includes a scintillator for converting X-ray into light, and the sensor detects the light as the electromagnetic wave.
10. An image pickup device comprising:
a sensor for detecting a received electromagnetic wave according to claim 1 ; and
a field effect transistor for reading a signal from the sensor,
wherein the field effect transistor is a normally-off transistor having an active layer composed of an amorphous oxide semiconductor.
11. An image pickup device according to claim 10 , further comprising an imaging region which includes the sensor and is non-flat.
12. An image pickup device according to claim 10 , wherein the sensor is an X-ray sensor, and the X-ray sensor includes a scintillator for converting X-ray into light, and the sensor detects the light as the electromagnetic wave.