Solid state electrolyte memory device and method of fabricating the same
A method of fabricating a solid state electrolytes memory device is provided. An insulator layer is formed on a substrate. A conductive layer is formed on the insulator layer. At least two openings partially overlapped and capable of communicating with each other are formed in the conductive layer, so that the conductive layer forms at least a pair of tip electrodes. Thereafter, solid state electrolytes are filled in the openings.
1. A method of fabricating a solid state electrolytes memory device, comprising:
forming an insulator layer on a substrate;
forming a conductive layer on the insulator layer;
forming at least two openings partially overlapped and capable of communicating with each other in the conductive layer, so that the conductive layer forms at least one pair of tip electrodes; and
filling a solid state electrolyte in the openings.
2. The method of fabricating the solid state electrolytes memory device as claimed in claim 1 , wherein the openings have the same shape.
3. The method of fabricating the solid state electrolytes memory device as claimed in claim 1 , wherein the shape of openings is selected from a group consisting of round, ellipse, polygon, and any combination thereof.
4. The method of fabricating the solid state electrolytes memory device as claimed in claim 1 , wherein the conductive layer has four openings formed herein, and each two of the four openings are partially overlapped and capable of communicating with each other, such that the conductive layer forms a common electrode with four tips and four tip electrodes self-aligned with the four tips of the common electrode, so as to constitute a memory device with four storage points.
5. The method of fabricating the solid state electrolytes memory device as claimed in claim 1 , wherein the material of the insulator layer comprises silicon oxide, fluorine-doped glass, borophosphosilicate glass, phosphosilicate glass, silicon nitride, or silicon-oxy-nitride.
6. The method of fabricating the solid state electrolytes memory device as claimed in claim 1 , wherein the solid state electrolyte comprises germanium selenide (GeSe), germanium sulphide (GeS), AgTeSe, AgTeS, or AgSeS doped with silver, copper, chromium, or niobium.
7. The method of fabricating the solid state electrolytes memory device as claimed in claim 1 , wherein the material of the conductive layer comprises metal.
8. The method of fabricating the solid state electrolytes memory device as claimed in claim 7 , wherein the metal is selected from a group consisting of silver, gold, platinum, copper, tungsten, nickel, titanium nitride, and any combination thereof.
9. The method of fabricating the solid state electrolytes memory device as claimed in claim 1 , wherein the process of forming at least two openings partially overlapped and capable of communicating with each other in the conductive layer comprises:
forming a photoresist layer having a pattern of at least two openings partially overlapped and capable of communicating with each other on the conductive layer;
etching the conductive layer with the photoresist layer as mask, to form at least two openings partially overlapped and capable of communicating with each other in the conductive layer; and
removing the photoresist layer.
10. The method of fabricating the solid state electrolytes memory device as claimed in claim 1 , wherein the at least one pair of tip electrodes is a pair of self-aligned tip electrodes.
11. A solid state electrolytes memory device, comprising:
an insulator layer, located on a substrate;
a conductive layer, located on the insulator layer, and having at least two partially overlapped openings therein to form at least one pair of tip electrodes; and
a solid state electrolyte, located in the openings of the conductive layer;
wherein the insulator layer, the conductive layer, and the solid state electrolyte constitute a first layer of memory unit.
12. The solid state electrolytes memory device as claimed in claim 11 , wherein the openings have the same shape.
13. The solid state electrolytes memory device as claimed in claim 11 , wherein the shape of openings is selected from a group consisting of round, ellipse, polygon, and any combination thereof.
14. The solid state electrolytes memory device as claimed in claim 11 , wherein the conductive layer has four openings and each two of the four openings are partially overlapped with each other, such that the conductive layer forms a common electrode with four tips and four tip electrodes self-aligned with the four tips of the common electrode, so as to constitute a memory device having four storage points.
15. The solid state electrolytes memory device as claimed in claim 11 , wherein the solid state electrolyte comprises germanium selenide (GeSe), germanium sulphide (GeS), AgTeSe, AgTeS, or AgSeS doped with silver, copper, chromium, or niobium.
16. The solid state electrolytes memory device as claimed in claim 11 , wherein the material of the conductive layer comprises metal.
17. The solid state electrolytes memory device as claimed in claim 16 , wherein the metal is selected from a group consisting of silver, gold, platinum, copper, tungsten, nickel, titanium nitride, and any combination thereof.
18. The solid state electrolytes memory device as claimed in claim 11 , further comprising at least one second layer of memory unit located on the first layer of memory unit.
19. The solid state electrolytes memory device as claimed in claim 11 , wherein the at least one pair of tip electrodes is a pair of self-aligned tip electrodes.