Method of manufacturing electro-optical device

1. A method of manufacturing a plurality of electro-optical devices by cutting a composite substrate obtained by adhering a first substrate and a second substrate which faces the first substrate with an electro-optical layer interposed therebetween, the method comprising:

forming first notched portions in a notch surface of the second substrate along first outer shape lines that extend parallel to each other, the notch surface facing away from the electro-optical layer;

adhering a first tape to an adhesion surface of the first substrate, the adhesion surface facing away from the electro-optical layer;

applying force to the first notched portions from a surface of the first tape opposed to the adhesion surface so as to form first division surfaces in the second substrate, the first division surfaces starting from the first notched portions and extending to a first surface of the second substrate, the first surface facing the electro-optical layer;

performing a first dicing process on the second substrate along positions parallel to the first outer shape lines and different from the first division surfaces so as to form first division grooves in the notched surface, the first division grooves extending from the notched surface of the second substrate to the first surface of the second substrate,

performing a second dicing on the second substrate from the notched surface along second outer shape lines that intersect the first outer shape lines, so as to form second division grooves extending along the second outer shape lines;

removing portions surrounded by the first division surfaces, the first division grooves, and the first surface of the second substrate;

adhering a second tape to the notched surface after the first tape is removed from the adhesion surface of the first substrate;

forming second and third notched portions in the adhesion surface of the first substrate following parallel to the first and second outer shape lines;

applying force to the second notched portions from a surface of the second tape, which is opposed to an adhesion surface of the second tape, so as to form second division surfaces starting from the second notched portions in the first substrate and extending to a second surface of the first substrate, the second surface facing the electro-optical layer and to form third division surfaces starting from the third notched portions and extending following the second outer shape lines; and

dividing the plurality of electro-optical devices, which are divided from each other by the applying of the force to the second notched portions, from the second tape.

2. The method according to claim 1 , wherein, after the forming of the first notched portions, the composite substrate is cleaned using gas.

3. The method according to claim 1 , wherein, after the performing of the dicing process, the composite substrate is dried.

4. The method according to claim 1 , wherein, after the applying of the force to the second notched portions, the composite substrate is cleaned using gas.

5. The method according to claim 1 ,

wherein during the first dicing process, the second substrate is cut along the first outer shape lines by penetrating through the second substrate.