Metallic compound thin film that contains high-k dielectric metal, nitrogen, and oxygen
View Patent ↗After the surface of the substrate is cleaned, an interface layer or an antidiffusion film is formed. A metal oxide film is built upon the antidiffusion film Annealing is done in an NH 3 atmosphere so as to diffuse nitrogen in the metal oxide film. Building of the metal oxide film and diffusion of nitrogen are repeated several times, whereupon annealing is done in an O 2 atmosphere. By annealing the film in an O 2 atmosphere at a temperature higher than 650° C., the leak current in the metal oxide film is controlled.
1. A metallic compound thin film in which at least Hf, N and O are included, the density of nitrogen in the film is 5 atomic percent or higher, two X-ray photoelectron spectroscopy spectral peaks occur in binding energy ranges 17.5-18.5 eV and 19.5-20.5 eV of an Hf4f, and a spectral peak at 15-17 eV does not occur.
2. A semiconductor device which includes a metallic compound thin film formed on a semiconductor substrate, wherein
least Hf, N and O are included in the metallic compound thin film, the density of nitrogen in the film is 5 atomic percent or higher, two X-ray photoelectron spectroscopy spectral peaks occur in binding energy ranges 17.5-18.5 eV and 19.5-20.5 eV of an Hf4f, and a spectral peak at 15-17 eV does not occur.