Multilayer ceramic substrate, method for producing same, and composite green sheet for forming multilayer ceramic substrate
A multilayer ceramic substrate includes a base layer made of an aggregate of a first powder including a glass material and a first ceramic material, a constraining layer made of an aggregate of a second powder including a second ceramic material that is not sintered at a temperature at which the glass material melts, an intermediate layer made of an aggregate of a third powder including a viscosity-reducing material that reduces the viscosity of the melt of the glass material, and a conductive film disposed along at least one main surface of the base layer, the constraining layer, and the intermediate layer. The intermediate layer is arranged such that one main surface thereof is in contact with the base layer and the other main surface thereof is in contact with the constraining layer. At least a portion of the first powder is in a sintered state. The second powder is in an unsintered state, and particles of the second powder are bonded to each other by diffusion or flow of a portion of the first powder including the glass material and a portion of the third powder into the constraining layer.
1. A multilayer ceramic substrate comprising:
a base layer made of an aggregate of a first powder including a glass material and a first ceramic material;
a constraining layer made of an aggregate of a second powder including a second ceramic material that is not sintered at a temperature at which the glass material melts;
an intermediate layer made of an aggregate of a third powder including a viscosity-reducing material that reduces the viscosity of the melt of the glass material; and
a conductive film disposed along at least one main surface of the base layer, the constraining layer, and the intermediate layer; wherein
the intermediate layer is arranged such that one main surface thereof is in contact with the base layer and the other main surface thereof is in contact with the constraining layer;
the intermediate layer has a thickness of about 2 μm to about 10 μm;
at least a portion of the first powder is in a sintered state; and
the second powder is in an unsintered state, and particles of the second powder are bonded to each other by diffusion or flow of a portion of the first powder including the glass material and a portion of the third powder into the constraining layer.
2. The multilayer ceramic substrate according to claim 1 , wherein the viscosity-reducing material includes an oxide of a transition element.
3. The multilayer ceramic substrate according to claim 1 , wherein the viscosity-reducing material includes at least one of a low-viscosity glass material and a low-melting-point glass material.
4. The multilayer ceramic substrate according to claim 1 , wherein the portion of the glass material included in the base layer diffuses or flows into the entirety of the constraining layer, and all of the particles of the second powder are bonded to each other by the portion of the glass material.
5. The multilayer ceramic substrate according to claim 1 , wherein the glass material includes a vitrified portion before sintering at least a portion of the first powder.
6. The multilayer ceramic substrate according to claim 1 , wherein the glass material includes a portion melted and vitrified through sintering at least a portion of the first powder.
7. The multilayer ceramic substrate according to claim 1 , wherein the glass material is not crystallized.
8. The multilayer ceramic substrate according to claim 1 , wherein the multilayer ceramic substrate includes a plurality of the base layers and has a laminated structure portion in which the intermediate layer, the constraining layer, and the intermediate layer are stacked in that order, each being disposed between adjacent base layers in the stacking direction.
9. The multilayer ceramic substrate according to claim 8 , wherein contents of the glass material of the base layers between which the intermediate layer, the constraining layer, and the intermediate layer are interposed are substantially the same per unit volume, the base layers being adjacent in the stacking direction.
10. The multilayer ceramic substrate according to claim 1 , wherein the multilayer ceramic substrate includes a plurality of constraining layers and has a laminated structure portion in which the intermediate layer, the base layer, and the intermediate layer are stacked in that order, each being disposed between adjacent constraining layers in the stacking direction.
11. The multilayer ceramic substrate according to claim 1 , wherein the constraining layer has a thickness less than that of the base layer.
12. The multilayer ceramic substrate according to claim 1 , further comprising a cavity having an opening positioned at least along one main surface of the multilayer ceramic substrate.
13. The multilayer ceramic substrate according to claim 1 , wherein an absolute value of a difference in thermal expansion coefficient between the base layer and the intermediate layer is about 2.0 ppm/° C. or less, and an absolute value of a difference in thermal expansion coefficient between the constraining layer and the intermediate layer is about 2.0 ppm/° C. or less.