Thin film device
The present invention provides a thin film device in which resin film does not easily separate. In a thin film device, a conductor pattern is formed on one of the main surfaces of a plate-shaped base, and the conductor pattern is covered with a resin film. This conductor pattern has a bottom face disposed on the main surface of the base, a top face that faces the bottom face and is distant from the main surface of the base, and two side faces that connect the bottom face and the top face. A depressed portion is formed in these side faces, and an insulation film extends into the depressed portion.
1. A thin film device, comprising:
a plate-shaped base;
a conductor pattern formed on one of main surfaces of said base through a seed layer; and
a first resin film that is formed on said main surface, a second resin film that is formed on one face of said first resin film opposite another face contacted with said main surface of said base, and a third resin film that is formed on an upper face of said second resin film opposite a lower face contacted with the said first resin film, wherein
said conductor pattern comprises a lower conductor, an upper conductor and a connection conductor,
said lower conductor is formed through a lower seed layer on said main surface of said base and is covered with said first resin film,
said upper conductor is formed through an upper seed layer on an upper face of said second resin film and is covered with said third resin film,
said connection conductor penetrates said first and second resin films and connects said lower conductor with said upper conductor electrically,
said lower conductor has a bottom face disposed on said main surface of said base, a top face that faces said bottom face of said lower conductor and is distant from said main surface of said base, and two side faces that connect said bottom face and said top face,
a depressed portion of said lower conductor is formed in an edge region of said lower conductor adjacent to said bottom face of said lower conductor and at least one of said two side faces of said lower conductor,
said lower conductor has a base side corner section chamfered by said depressed portion of said lower conductor,
said base side corner section of said lower conductor is chamfered so that a surface thereof forms a curved surface,
said depressed portion of said lower conductor is filled with said first resin film,
a part of said first resin film located between said base side corner section of said lower conductor and said main surface of said base is disposed on said lower seed layer,
said upper conductor has a bottom face disposed on said upper face of said second resin film, a top face that faces said bottom face of said upper conductor and is distant from said upper face of said second resin film, and two side faces that connect said bottom face and said top face,
a depressed portion of said upper conductor is formed in an edge region of said upper conductor adjacent to said bottom face of said upper conductor and at least one of said two side faces of said upper conductor,
said upper conductor has a base side corner section chamfered by said depressed portion of said upper conductor,
said base side corner section of said upper conductor is chamfered so that a surface thereof forms a curved surface,
said depressed portion of said upper conductor is filled with said third resin film, and
a part of said third resin film located between said base side corner section of said upper conductor and said upper face of said second resin film is disposed on said upper seed layer.
2. The thin film device according to claim 1 , wherein said conductor pattern comprises an other conductor pattern adjacent to the conductor pattern, and said depressed portion of the lower conductor faces a depressed portion of a lower conductor of the other conductor pattern.
3. The thin film device according to claim 1 , wherein a line of intersection between the surface of said base side corner section of the lower conductor and a plane vertical to the direction in which said base side corner section of the lower conductor extends has a total length w and a maximum height h from said main surface of said base, where w/h is 1.15 or more.
4. The thin film device according to claim 1 , wherein at least one upper side corner section of said conductor pattern is chamfered.
5. The thin film device according to claim 1 , wherein the lower conductor is an interconnection,
a maximum height h of said base side corner section of said interconnection from said main surface of said base and a height H of said interconnection itself satisfy 0<h<0.1H.