Scintillator panel, method of manufacturing the same and radiation imaging apparatus
A scintillator panel comprising: a radiation-transparent substrate; and a phosphor layer provided on the substrate, the phosphor layer emitting light when irradiated with a radiation, wherein at least one edge of the substrate and at least one edge of the phosphor layer are arranged on a same plane.
1. A method of manufacturing a scintillator panel comprising a phosphor layer having cesium iodide provided on a resin film substrate comprising a polyimide film,
further comprising the steps of:
forming a phosphor layer on a radiation-transparent substrate by a vapor evaporation process with a rotation mechanism, and
cutting the substrate and the phosphor layer formed on the substrate so as to arrange at least one edge of the substrate and at least one edge of the phosphor layer on a same plane.
2. The method of manufacturing a scintillator panel of claim 1 comprising said cutting step,
wherein the substrate and the phosphor layer each have an edge surface perpendicular to a top surface of the substrate.
3. The method of manufacturing a scintillator panel of claim 1 , wherein a thickness of the substrate is 50 μm or more.
4. A method of manufacturing a radiation imaging apparatus comprising a step of:
laminating a photoelectric conversion means on the scintillator panel manufactured by claim 1 by aligning an edge of the scintillator panel with an edge of an effective imaging area of the photoelectric conversion means.