Light emitting device, electronic appliance, and method for manufacturing light emitting device
View Patent ↗To provide a light emitting device that has a structure in which a light emitting element is sandwiched by two substrates to prevent moisture from penetrating into the light emitting element, and a method for manufacturing thereof. In addition, a gap between the two substrates can be controlled precisely. In the light emitting device according to the present invention, an airtight space surrounded by a sealing material with a closed pattern is kept under reduced pressure by attaching the pair of substrates under reduced pressure. A columnar or wall-shaped structure is formed between light emitting regions inside of the sealing material, in a region overlapping with the sealing material, or in a region outside of the sealing material so that the gap between the pair of substrates can be maintained precisely.
1. A method for manufacturing a light emitting device comprising a pixel portion with a plurality of light emitting elements, wherein each of the plurality of light emitting elements includes a cathode, a layer containing an organic compound, and an anode between a pair of light-transmitting substrates, the method comprising the steps of:
forming the pixel portion of a light emitting element over one substrate of the pair of substrates;
forming a columnar spacer over the other substrate of the pair of substrates;
forming a sealing material adjacent to the columnar spacer over the other substrate of the pair of substrates;
attaching the pair of substrates with the columnar spacer and the sealing material interposed between the substrates and the sealing material disposed around the pixel portion of the light emitting element, with the attaching occurring in a chamber under reduced pressure with a vacuum applied to the chamber set to be 1 Pa or less such that the reduced pressure in the chamber is between 1 Pa and atmospheric pressure; and
gradually increasing pressure within the chamber up to atmospheric pressure after the attaching step.
2. The method for manufacturing a light emitting device according to claim 1 , wherein the pixel portion comprises a TFT.
3. The method for manufacturing a light emitting device according to claim 1 , wherein the columnar spacer is disposed inside of the region surrounded by the sealing material.
4. The method for manufacturing a light emitting device according to claim 1 , wherein the light emitting device is a portable information terminal, a camera such as a video camera and a digital camera, a personal computer, or the like.
5. The method for manufacturing a light emitting device according to claim 1 , wherein the sealing material is higher than the columnar spacer.
6. The method for manufacturing a light emitting device according to claim 1 , wherein the sealing material is formed over the columnar spacer.
7. A method for manufacturing a light emitting device comprising a pixel portion with a plurality of light emitting elements, wherein each of the plurality of light emitting elements includes a cathode, a layer containing an organic compound, and an anode between a pair of light-transmitting substrates, the method comprising the steps of:
forming the pixel portion of a light emitting element over one substrate of the pair of substrates;
forming a columnar spacer over the other substrate of the pair of substrates;
forming a sealing material adjacent to the columnar spacer over the other substrate of the pair of substrates;
dropping a filler in a region surrounded by the sealing material;
attaching the pair of substrates with the columnar spacer and the sealing material interposed between the substrates and the sealing material disposed around the pixel portion of the light emitting element, with the attaching occurring in a chamber under reduced pressure with a vacuum applied to the chamber set to be 1 Pa or less such that the reduced pressure in the chamber is between 1 Pa and atmospheric pressure; and
gradually increasing pressure within the chamber up to atmospheric pressure after the attaching step.
8. The method for manufacturing a light emitting device according to claim 7 , wherein the filler is dropped by using a droplet discharging device.
9. The method for manufacturing a light emitting device according to claim 7 , the filler is cured by heat treatment or irradiation with light so that the pair of substrates is fixed to each other.
10. The method for manufacturing a light emitting device according to claim 7 , wherein the pixel portion comprises a TFT.
11. The method for manufacturing a light emitting device according to claim 7 , wherein the columnar spacer is disposed inside of the region surrounded by the sealing material.
12. The method for manufacturing a light emitting device according to claim 7 , wherein the light emitting device is a portable information terminal, a camera such as a video camera and a digital camera, a personal computer, or the like.
13. The method for manufacturing a light emitting device according to claim 7 , wherein the sealing material is higher than the columnar spacer.
14. The light method for manufacturing a emitting device according to claim 7 , wherein the sealing material is formed over the columnar spacer.
15. A method for manufacturing a light emitting device comprising a pixel portion with a plurality of light emitting elements, wherein each of the plurality of light emitting elements includes a cathode, a layer containing an organic compound, and an anode between a pair of light-transmitting substrates, the method comprising the steps of:
forming the pixel portion of a light emitting element over one substrate of the pair of substrates;
forming a wall-shaped spacer over the other substrate of the pair of substrates;
forming a sealing material adjacent to the wall-shaped spacer over the other substrate of the pair of substrates;
attaching the pair of substrates with the wall-shaped spacer and the sealing material interposed between the substrates and the sealing material disposed around the pixel portion of the light emitting element, with the attaching occurring in a chamber under reduced pressure with a vacuum applied to the chamber set to be 1 Pa or less such that the reduced pressure in the chamber is between 1 Pa and atmospheric pressure; and
gradually increasing pressure within the chamber up to atmospheric pressure after the attaching step.
16. The method for manufacturing a light emitting device according to claim 15 , wherein the pixel portion comprises a TFT.
17. The method for manufacturing a light emitting device according to claim 15 , wherein the wall-shaped spacer is disposed inside of the region surrounded by the sealing material.
18. The method for manufacturing a light emitting device according to claim 15 , wherein the light emitting device is a portable information terminal, a camera such as a video camera and a digital camera, a personal computer, or the like.
19. The method for manufacturing a light emitting device according to claim 15 , wherein the sealing material is higher than the wall-shaped spacer.
20. The method for manufacturing a light emitting device according to claim 15 , wherein the sealing material is formed over the wall-shaped spacer.
21. A method for manufacturing a light emitting device comprising a pixel portion with a plurality of light emitting elements, wherein each of the plurality of light emitting elements includes a cathode, a layer containing an organic compound, and an anode between a pair of light-transmitting substrates, the method comprising the steps of:
forming the pixel portion of a light emitting element over one substrate of the pair of substrates;
forming a wall-shaped spacer over the other substrate of the pair of substrates;
forming a sealing material adjacent to the wall-shaped spacer over the other substrate of the pair of substrates;
dropping a filler in a region surrounded by the sealing material;
attaching the pair of substrates with the wall-shaped spacer and the sealing material interposed between the substrates and the sealing material disposed around the pixel portion of the light emitting element, with the attaching occurring in a chamber under reduced pressure with a vacuum applied to the chamber set to be 1 Pa or less such that the reduced pressure in the chamber is between 1 Pa and atmospheric pressure; and
gradually increasing pressure within the chamber up to atmospheric pressure after the attaching step.
22. The method for manufacturing a light emitting device according to claim 21 , wherein the filler is dropped by using a droplet discharging device.
23. The method for manufacturing a light emitting device according to claim 21 , the filler is cured by heat treatment or irradiation with light so that the pair of substrates is fixed to each other.
24. The method for manufacturing a light emitting device according to claim 21 , wherein the pixel portion comprises a TFT.
25. The method for manufacturing a light emitting device according to claim 21 , wherein the wall-shaped spacer is disposed inside of the region surrounded by the sealing material.
26. The method for manufacturing a light emitting device according to claim 21 , wherein the light emitting device is a portable information terminal, a camera such as a video camera and a digital camera, a personal computer, or the like.
27. The method for manufacturing a light emitting device according to claim 21 , wherein the sealing material is higher than the wall-shaped spacer.
28. The light method for manufacturing a emitting device according to claim 21 , wherein the sealing material is formed over the wall-shaped spacer.