Multi-metal-oxide high-K gate dielectrics
View Patent ↗A semiconductor structure having a high-k dielectric and its method of manufacture is provided. A method includes forming a first dielectric layer over the substrate, a metal layer over the first dielectric layer, and a second dielectric layer over the metal layer. A method further includes annealing the substrate in an oxidizing ambient until the three layers form a homogenous high-k dielectric layer. Forming the first and second dielectric layers comprises a non-plasma deposition process such atomic layer deposition (ALD), or chemical vapor deposition (CVD). A semiconductor device having a high-k dielectric comprises an amorphous high-k dielectric layer, wherein the amorphous high-k dielectric layer comprises a first oxidized metal and a second oxidized metal. The atomic ratios of all oxidized metals are substantially uniformly within the amorphous high-k dielectric layer.
1. A method of forming a high-k dielectric layer on a substrate, the method comprising:
forming a first dielectric layer over the substrate;
forming a substantially nitrogen free metal layer over the first dielectric layer;
forming a second dielectric layer over the metal layer; and
annealing the substrate in an oxidizing ambient until the first dielectric layer, the metal layer, and the second dielectric layer combine to form a homogenous high-k dielectric layer.
2. The method of claim 1 , wherein forming the first and second dielectric layers comprises a non-plasma deposition process.
3. The method of claim 2 , wherein the non-plasma deposition process comprises a process selected from the group consisting essentially of atomic layer deposition (ALD), and chemical vapor deposition (CVD).
4. The method of claim 1 , wherein forming the metal layer comprises plasma vapor deposition.
5. The method of claim 4 , wherein the metal layer comprises a material selected from the group consisting essentially of Ti, Ta, Zr, and combinations thereof.
6. The method of claim 1 , wherein the metal layer comprises at least two materials selected from the group consisting essentially of Ti, Ta, Zr, and combinations thereof.
7. The method of claim 1 , wherein the first and second dielectric layers comprise a material selected from the group consisting essentially of HfSiON, Ta 2 O 5 , TiO 2 , Al 2 O 3 , ZrO 2 , HfO 2 , Y 2 O 3 , HfSiO x , HfAlO x , La 2 O 3 , DyScO 3 , PbTiO 3 , BaTiO 3 , SrTiO 3 , PbZrO 3 , rare-earth oxides, rare-earth scandates, aluminates and silicates thereof, and combinations thereof.
8. The method of claim 1 , further comprising forming an interfacial layer between the substrate and the homogenous high-k dielectric layer, wherein the interfacial layer comprises a material selected from the group consisting essentially of SiN, SiO, SiO 2 , SiON, Si, Hf, Al, Zr, Ti, Ta, La, Y, and combinations thereof.
9. The method of claim 1 , wherein the oxidizing ambient comprises a material selected from the group consisting essentially of O 2 , O 3 , N 2 O, NO x , and combinations thereof.
10. The method of claim 1 , wherein the homogenous high-k dielectric layer is substantially amorphous.
11. The method of claim 1 , wherein annealing the substrate comprises maintaining a temperature lower than about 1000° C.
12. The method of claim 1 , wherein the homogenous high-k dielectric layer comprises a first metal and a second metal, wherein an atomic ratio of the first metal to the second ratio is between about 3:7 and about 7:3.
13. A method of forming a semiconductor structure on a substrate, the method comprising:
forming an interfacial layer over the substrate;
forming a first high-k dielectric layer over the substrate using an atomic layer deposition (ALD) process;
forming a non-nitrogen metal layer over the first high-k dielectric layer;
forming a second high-k dielectric layer over the non-nitrogen metal layer using an ALD process; and
transforming the first high-k dielectric layer, the non-nitrogen metal layer, and the second high-k dielectric layer into a substantially homogenous high-k dielectric layer.
14. The method of claim 13 , wherein the transforming is performed at least in part by annealing the substrate in an oxidizing ambient until the first high-k dielectric layer, the non-nitrogen metal layer, and the second high-k dielectric layer form a homogenous high-k dielectric layer.
15. The method of claim 14 , wherein the oxidizing ambient comprises a material selected from the group consisting essentially of O 2 , O 3 , N 2 O, NO x , and combinations thereof.
16. The method of claim 14 , wherein the annealing oxidizes the first metal layer thereby forming an oxidized metal, wherein the oxidized metal has a dielectric constant equal to or greater than the first high-k dielectric layer.
17. The method of claim 13 , wherein the first and second high-k dielectric layers have different respective dielectric constants.
18. The method of claim 13 , wherein the first and second high-k dielectric layer comprise a material selected from the group consisting essentially HfSiON, Ta 2 O 5 , TiO 2 , Al 2 O 3 , ZrO 2 , HfO 2 , Y 2 O 3 , HfSiO x , HfAlO x , La 2 O 3 , DyScO 3 , PbTiO 3 , BaTiO 3 , SrTiO 3 , PbZrO 3 , rare-earth oxides, rare-earth scandates, aluminates and silicates thereof, and combinations thereof.
19. The method of claim 13 , wherein the non-nitrogen metal layer comprises a first metal layer and a second metal layer.
20. The method of claim 19 , wherein the first and second metal layers have a thickness ratio between about 3:7 and about 7:3.
21. The method of claim 19 , wherein the first and second metal layers have a thickness ratio between about 4:6 and about 6:4.