Method for fabricating capacitor in semiconductor device

1. A method for fabricating a capacitor in a semiconductor device, the method comprising:

forming a bottom electrode of the capacitor over a semiconductor substrate, the bottom electrode having a non-planar shape;

forming a Zr x Al y O z dielectric layer over the bottom electrode using an atomic layer deposition (ALD) method, wherein the Zr x Al y O z dielectric layer comprises a zirconium (Zr) component, an aluminum (Al) component and an oxygen (O) component mixed in predetermined mole fractions of x, y and z, respectively, the non-planar shape of the bottom electrode providing an increased contact area between the Zr x Al y O z dielectric layer and the bottom electrode; and

forming a top electrode of the capacitor over the Zr x Al y O z dielectric layer,

wherein the sum of the mole fractions of x, y and z in the Zr x Al y O z dielectric layer is approximately 1,

wherein a ratio of the mole fraction of the Zr component (x) to the mole fraction of the Al component (y) is in a range of approximately 1:1 to 10:1, and

wherein the forming of the Zr x Al y O z dielectric layer consists of the following sequence step:

supplying a Zr source gas to enable Zr to be adsorbed on the bottom electrode,

supplying a first purge gas to purge out non-adsorbed parts of the Zr source gas,

supplying an Al source gas to enable Al to be adsorbed onto the Zr provided on the bottom electrode,

supplying a second purge gas to purge out non-adsorbed parts of the Al source gas,

supplying a reaction gas to react with the Zr and Al source gases provided on the target, thereby forming the Zr x Al y O z dielectric layer, wherein the reaction gas comprises an oxide gas, and

supplying a third purge gas to remove non-reacted parts of the reaction gas.

2. The method of claim 1 , wherein the Zr source gas includes one selected from the group consisting of ZrCl 4 , Zr(N(CH 3 )C 2 H 5 ) 4 , Zr(O-tBu) 4 , Zr(N(CH 3 ) 2 ) 4 , Zr(N(C 2 H 5 )(CH 3 )) 4 , Zr(N(C 2 H 5 ) 2 ) 4 , Zr(TMHD) 4 , Zr(OiC 3 H 7 ) 3 (TMTD), Zr(OtBu) 4 , and a Zr containing compound.

3. The method of claim 1 , wherein the Al source gas includes one selected from the group consisting of Al(CH 3 ) 3 , Al(C 2 H 5 ) 3 and an Al containing compound.

4. The method of claim 1 , wherein the oxide gas includes one selected from the group consisting of O 3 with a concentration of approximately 100 gm −3 to approximately 500 gm −3 , O 2 , O 2 plasma, N 2 O, N 2 O plasma, and H 2 O vapor, wherein the reaction gas is supplied at a flow rate ranging from approximately 100 sccm to approximately 1,000 sccm for approximately 3 seconds to approximately 10 seconds.

5. The method of claim 1 , wherein the first, second and third purge gases include one of N 2 gas and Ar gas.

6. The method of claim 1 , wherein the Zr x Al y O z dielectric layer is formed to a thickness ranging from approximately 50 Å to approximately 100 Å.

7. The method of claim 1 , wherein the Zr x Al y O z dielectric layer is formed under conditions of a substrate temperature ranging from approximately 200° C. to approximately 500° C. and a chamber pressure ranging from approximately 0.1 torr to approximately 1 torr.

8. The method of claim 1 , further comprising performing an annealing process after the forming of the Zr x Al y O z dielectric layer.

9. The method of claim 8 , wherein the annealing process proceeds with a plasma annealing process performed for approximately 1 minute to approximately 5 minutes under conditions of: an ambient gas including one selected from the group consisting of N 2 , H 2 , N 2 /H 2 , NH 3 N 2 O, N 2 /O 2 , O 2 , and O 3 and supplied at a flow rate ranging from approximately 5 sccm to approximately 5,000 sccm; a temperature ranging from approximately 200° C. to approximately 500° C.; a plasma generated with radio frequency power ranging from approximately 100 W to approximately 500 W; and a pressure of approximately 0.1 torr to approximately 1 torr.

10. The method of claim 8 , wherein the annealing process proceeds with a rapid thermal process performed under conditions of: a temperature ranging from approximately 500° C. to approximately 800° C.; one of an ascending chamber pressure ranging from approximately 700 torr to approximately 760 torr and a descending pressure ranging from approximately 1 torr to approximately 100 torr; and a gas selected from the group consisting of N 2 , H 2 , N 2 /H 2 , NH 3 , N 2 O, N 2 /O 2 , O 2 , and O 3 and supplied at a flow rate ranging from approximately 5 sccm to approximately 5,000 sccm.

11. The method of claim 8 , wherein the annealing process proceeds with a furnace annealing process performed under conditions of: a gas selected from the group consisting of N 2 , H 2 , N 2 /H 2 , NH 3 , N 2 O, N 2 /O 2 , O 2 , and O 3 and supplied at a flow rate ranging from approximately 5 sccm to approximately 5,000 sccm; and a temperature ranging from approximately 600° C. to approximately 800° C.

12. The method of claim 1 , wherein the bottom electrode and the top electrode include one selected from the group consisting of TiN, TaN, W, WN, Ru, RuO 2 , Ir, IrO 2 , and Pt.

13. The method of claim 1 , further comprising, annealing the bottom electrode to densify the bottom electrode, the annealing being performed in an ambient gas selected from the group consisting of N 2 , H 2 , N 2 /H 2 , O 2 , O 3 , and NH 3 , wherein the Zr x Al y O z dielectric layer is formed over the bottom electrode after the bottom electrode has been annealed.

14. The method of claim 1 , further comprising, after the forming of the top electrode, forming a passivation layer over the top electrode using an ALD method.

15. The method of claim 14 , wherein the passivation layer is formed to a thickness ranging from approximately 50 Å to approximately 200 Å.

16. The method of claim 14 , wherein the passivation layer includes one of an oxide-based material and a metal-based material.

17. The method of claim 16 , wherein the oxide-based material includes one selected from the group consisting of Al 2 O 3 , HfO 2 , Ta 2 O 5 , ZrO 2 , TiO 2 , and La 2 O 3 .

18. The method of claim 16 , wherein the metal-based material includes TiN.

19. The method of claim 13 , further comprising:

annealing the Zr x Al y O z dielectric layer prior to forming the top electrode.

20. The method of claim 19 , wherein the Zr x Al y O z dielectric layer is performed in an environment including oxygen.

21. The method of claim 1 , wherein the Zr x Al y O z dielectric layer is formed to a thickness of about 50 Å.

22. The method of claim 8 , wherein the annealing process is performed under an environment including oxygen.