Semiconductor device and method for manufacturing same
In a conventional semiconductor device, an excessive etching occurs in a section where an opening for contact plug is formed, causing a damage to a diffusion layer located under the opening. A semiconductor device 1 includes a region D 1 for forming an electric circuit, and a seal ring 30 (guard ring) that surrounds the region D 1 for forming the electric circuit. A DRAM 40 is formed in the region D 1 for forming the electric circuit. Interlayer insulating films 22, 24, 26 and 28 are formed on a semiconductor substrate 10 . The seal ring 30 is formed in the interlayer insulating films 22, 24, 26 and 28 , and at least a portion there of is located spaced apart from the semiconductor substrate 10.
1. A semiconductor device having a region for forming an electric circuit, the region including a dynamic random access memory (DRAM) and peripheral circuits of the DRAM, comprising:
a semiconductor substrate;
an interlayer insulating film provided on said semiconductor substrate; and
a guard ring, provided in said interlayer insulating film, and surrounding said region for forming the electric circuit,
wherein a section of said guard ring discontinuously surrounds said region for forming the electric circuit along a periphery of said region.
2. The semiconductor device as set forth in claim 1 , wherein said interlayer insulating film includes a first interlayer insulating film provided on said semiconductor substrate and a second interlayer insulating film provided in a layer that is located at a higher level than that of said first interlayer insulating film.
3. The semiconductor device as set forth in claim 2 , wherein, said guard ring is provided only in said second interlayer insulating film and is not provided in said first interlayer insulating film.
4. The semiconductor device as set forth in claim 2 , wherein a section of said guard ring located within said first interlayer insulating film discontinuously surrounds said region for forming an electric circuit, and a section of said guard ring located within said second interlayer insulating film continuously surrounds said region for forming the electric circuit.
5. The semiconductor device as set forth in claim 4 , wherein said section of said guard ring located within said first interlayer insulating film is composed of a plurality of electroconducting plugs, which are provided to be spaced apart from one to the other.
6. The semiconductor device as set forth in claim 5 , wherein a geometry of said electroconducting plug in plan view is equivalent to a geometry of a contact plug in said region for forming the electric circuit.
7. The semiconductor device as set forth in claim 6 , wherein said geometry is a circle.
8. The semiconductor device as set forth in claim 5 , wherein a dimension of said electroconducting plug is substantially the same as a dimension of the contact plug in said region for forming the electric circuit.
9. The semiconductor device as set forth in claim 5 , wherein an electrically conducting film composed of a material that is same as a material composing a gate electrode in said region for forming the electric circuit is interposed between said electroconducting plug and said semiconductor substrate.
10. The semiconductor device as set forth in claim 2 , wherein a capacitor constituting a cell of said DRAM is provided in said second interlayer insulating film.
11. The semiconductor device as set forth in claim 2 , further comprising a nitride film, which is provided so as to contact with a lower surface of said second interlayer insulating film.
12. The semiconductor device as set forth in claim 2 , further comprising a nitride film, which is provided so as to contact with an upper surface of said first interlayer insulating film.
13. The semiconductor device as set forth in claim 2 , further comprising a nitride film, which is provided in said first interlayer insulating film, and covers a transistor formed in said region for forming the electric circuit.
14. A method for manufacturing a semiconductor device having a region for forming an electric circuit, the region including a dynamic random access memory (DRAM) and peripheral circuits of the DRAM, and a guard ring surrounding said region for forming the electric circuit, comprising:
forming an interlayer insulating film on a semiconductor substrate; and
forming said guard ring in said interlayer insulating film so that a section of said guard ring discontinuously surrounds said region for forming the electric circuit along a periphery of said region.
15. The method as set forth in claim 14 , wherein said forming of said interlayer insulating film comprises forming a first interlayer insulating film on said semiconductor substrate and a second interlayer insulating film in a layer that is located at a higher level than that of said first interlayer insulating film.
16. The method as set forth in claim 15 , wherein said forming of said guard ring comprises forming a section of said guard ring within said first interlayer insulating film to discontinuously surround said region for forming the electric circuit, and forming a section of said guard ring within said second interlayer insulating film to continuously surround said region for forming the electric circuit.