Organic electroluminescent display device and method of preparing the same
An organic electroluminescent display device and a method of preparing the same are provided. The organic electroluminescent display device may include a first electrode formed on a substrate. A second electrode may be formed so as to be insulated from the first electrode. One or more organic layers may be interposed between the first electrode and the second electrode and include at least an emission layer. A protective layer may be formed so as to cover the second electrode. The protective layer may have a surface roughness (rms) of about 5 Å to about 50 Å. The organic electroluminescent display device including a protective layer having a low surface roughness may benefit from superior lifespan characteristics.
1. A method of preparing an organic electroluminescent display device, the method comprising:
forming a first electrode on a substrate;
forming one or more organic layers including at least an emission layer on the first electrode;
forming a second electrode so as to substantially cover the organic layer; and
forming a protective layer so as to substantially cover the second electrode,
wherein the protective layer is formed using ion beam assisted deposition (IBAD) using an evaporation source and an ion beam source,
wherein a ratio of a number of ions emitted from the ion beam source to a number of particles emitted from the evaporation source is 1:1 to 0.9:1.
2. The method of claim 1 , wherein particles emitted from the evaporation source comprise at least one material selected from the group consisting of metal oxides and metal nitrides.
3. The method of claim 2 , wherein particles emitted from the evaporation source comprise SiO x , SiN x (x≧1), MgO, TiO, TaO, or CeO.
4. The method of claim 1 , wherein ions emitted from the ion beam source are ions of at least one atom selected from the group consisting of inert gases.
5. The method of claim 1 , wherein energy of the ion beam source is in the range of 50-200 eV.
6. The method of claim 1 , wherein a surface roughness (rms) of the protective layer is in a range of about 5 Å to about 50 Å.
7. A method of claim 1 ,
wherein the protective layer is composed of an insulating material containing a network former.
8. The method of claim 7 , wherein the insulating material containing the network former is at least one material selected from the group consisting of SiLiO, SiNaO, SiKO, SiCaO, SiSnO, SiRbO, SiCsO and SiBaO.
9. The method of claim 7 , wherein particles emitted from the evaporation source comprise at least one material selected from the group consisting of metal oxides and metal nitrides and at least one atom selected from the group consisting of Li, Na, K, Ca, Sn, Rb, Cs, Ba, Pb, Be, Mg, Ce and Nb.
10. A method of preparing an organic electroluminescent display device, the method comprising:
forming a first electrode on a substrate;
forming one or more organic layers including at least an emission layer on the first electrode;
forming a second electrode so as to substantially cover the organic layer; and
forming a protective layer so as to substantially cover the second electrode,
wherein the protective layer is formed using ion beam assisted deposition (IBAD) using an evaporation source and an ion beam source,
wherein the protective layer is composed of an insulating material containing a network former, and
wherein the insulating material containing the network former has a refractive index of about 2.0 or greater.
11. The method of claim 10 , wherein particles emitted from the evaporation source comprise at least one material selected from the group consisting of metal oxides and metal nitrides.
12. The method of claim 11 , wherein particles emitted from the evaporation source comprise SiO x , SiN x (x≧1), MgO, TiO, TaO, or CeO.
13. The method of claim 10 , wherein ions emitted from the ion beam source are ions of at least one atom selected from the group consisting of inert gases.
14. The method of claim 10 , wherein energy of the ion beam source is in the range of 50-200 eV.
15. A method of preparing an organic electroluminescent display device, the method comprising:
forming a first electrode on a substrate;
forming one or more organic layers including at least an emission layer on the first electrode;
forming a second electrode so as to substantially cover the organic layer; and
forming a protective layer so as to substantially cover the second electrode,
wherein the protective layer is formed using ion beam assisted deposition (IBAD) using an evaporation source and an ion beam source,
wherein the protective layer is composed of an insulating material containing a network former, and
wherein the insulating material containing the network former has an optical band gap of about 3.0 eV to about 6.0 eV.
16. The method of claim 15 , wherein particles emitted from the evaporation source comprise at least one material selected from the group consisting of metal oxides and metal nitrides.
17. The method of claim 15 , wherein particles emitted from the evaporation source comprise SiO x , SiN x (x≧1), MgO, TiO, TaO, or CeO.
18. The method of claim 15 , wherein ions emitted from the ion beam source are ions of at least one atom selected from the group consisting of inert gases.
19. The method of claim 15 , wherein energy of the ion beam source is in the range of 50-200 eV.