MEMS scan controller with inherent frequency and method of control thereof

1. A Micro-Electronic-Mechanical-System (MEMS) scan controller with inherent frequency applied to a laser scanner unit formed by a laser source emitting laser light, a MEMS mirror that drives a reflection mirror by a resonant way to scan the laser light forward/reverse through the object, a photoelectric detector (PD) that receives scanning light and turns the scanning light into PD signals, a scan lens that turns the scanning light into a linear relationship between angle and time and a laser controller that controls emitting of the laser source with preset frequency and time interval; wherein the MEMS scan controller comprising: a control logic, a control signal output unit and a bridge circuit; wherein the MEMS scan controller adjusts amplitude of the MEMS mirror by using the inherent resonant frequency of the MEMS mirror;

the control logic receives PD signals from the PD, calculates time interval of the PD signals to generate modulation signal of the MEMS mirror sent to the bridge circuit and amplitude variation signal of the MEMS mirror sent to the control signal output unit;

the control signal output unit receives the amplitude variation signal from the control logic and turns the amplitude variation signal into stable signal that control the laser controller;

the bridge circuit receives the modulation signal from the control logic and turns the modulation signal into driving signal that drive the MEMS mirror to oscillate;

thereby the laser scanner sends scan data string with preset frequency and time interval within effective scan window.

2. The MEMS scan controller with inherent frequency as claimed in claim 1 , wherein the scan lens of the laser scanner comprising a first scan lens and a second scan lens; wherein the effect of individual difference in inherent frequency of the MEMS mirror can be compensated by adjusting the relative distance on an optical axis between the first scan lens and the second scan lens.

3. The MEMS scan controller with inherent frequency as claimed in claim 1 , wherein the control signal output unit receives a stable signal of the MEMS mirror from the control logic and further sends a trigger signal for control of the laser controller to start/stop sending the scan data string.

4. The MEMS scan controller with inherent frequency as claimed in claim 1 , wherein the control logic compares resonant frequency of the MEMS mirror with preset scan data frequency of the laser controller and further sends frequency error signals to the laser controller.

5. A Micro-Electronic-Mechanical-System (MEMS) scan controller with inherent frequency applied to a laser scanner unit formed by a laser source emitting laser light, a MEMS mirror that drives a reflection mirror by a resonant way to scan the laser light forward/reverse through the object, two photoelectric detectors (PD) that receives scanning light and turns the scanning light into PD signals, a scan lens that turns the scanning light into a linear relationship between angle and time and a laser controller that controls emitting of the laser source with preset frequency and time interval; wherein the MEMS scan controller comprising: a control logic, a control signal output unit and a bridge circuit; wherein the MEMS scan controller adjusts amplitude of the MEMS mirror by using the inherent resonant frequency of the MEMS mirror;

the control logic receives PD signals from the two PDs, calculates time interval of the two PD signals to generate modulation signal of the MEMS mirror sent to the bridge circuit and amplitude variation signal of the MEMS mirror sent to the control signal output unit;

the control signal output unit receives the amplitude variation signal from the control logic and turns the amplitude variation signal into stable signal that control the laser controller;

the bridge circuit receives the modulation signal from the control logic and turns the modulation signal into driving signals that drive the MEMS mirror to oscillate;

thereby the laser scanner sends scan data string with preset frequency and time interval within effective scan window.

6. The MEMS scan controller with inherent frequency as claimed in claim 1 , wherein the scan lens of the laser scanner comprising a first scan lens and a second scan lens; wherein the effect of individual difference in inherent frequency of the MEMS mirror can be compensated by adjusting the relative distance on an optical axis between the first scan lens and the second scan lens.

7. The MEMS scan controller with inherent frequency as claimed in claim 5 , wherein the control signal output unit receives a stabilized signal of the MEMS mirror from the control logic and further sends a trigger signal for control of the laser controller to start/stop sending the scan data string.

8. The MEMS scan controller with inherent frequency as claimed in claim 5 , wherein the control logic compares resonant frequency of the MEMS mirror with preset scan data frequency of the laser controller and further sends frequency error signals to the laser controller.

9. A control method for MEMS scan controllers with inherent frequency applied to a MEMS scan controller with one PD comprising the steps of:

S 1 : checking whether a laser controller sends enable (ENB) signals or not; once the laser controller sends the ENB signal, a MEMS scan controller is turned on and a control logic of the MEMS scan controller sends modulation signals for driving a bridge circuit to make a MEMS mirror start oscillation; the control logic also calculates scan frequency and scan amplitude;

S 2 : sending modulation signals by the control logic of the MEMS scan controller so as to make the MEMS mirror oscillate stably with preset amplitude;

S 3 : sending stable signals to the laser controller by a control signal output unit of the MEMS scan controller after the MEMS mirror becoming stable.

10. The method as claimed in claim 9 , wherein in the step of sending stable signals to the laser controller by a control signal output unit of the MEMS scan controller after the MEMS mirror becoming stable, the control signal output unit further sends trigger signals that make the laser controller start/stop sending scan data string.

11. The method as claimed in claim 9 , wherein when the method is applied to the MEMS scan controller with one PD, the step S 2 further comprising the steps of:

S 21 : setting an initial value of load D and set an initial value of cycle T;

S 22 : checking the PD signals and whether there are triggered twice of the PD within a half cycle T; if not, start to adjust the amplitude;

S 23 : checking the ratio of two triggering time of the PD signal to the whole cycle, if the ratio is over preset range, adjust the amplitude;

S 24 : while adjusting the amplitude, adjusting the value of the load D so that there are two PD signals of the PD triggered within a half-cycle; once the value of the load D becomes stable, the amplitude of the MEMS mirror is stable.

12. The method as claimed in claim 9 , wherein when the method is applied to the MEMS scan controller with two PDs, the step S 2 further comprising the steps of:

S 21 : setting an initial value of load D and set an initial value of cycle T;

S 22 : checking the PD signals and whether there are triggered twice of the same PD within a half cycle T; if not, start to adjust the amplitude;

S 23 : checking the ratio of two triggering time of the PD signal to the whole cycle, if the ratio is over preset range, adjust the amplitude;

S 24 : while adjusting the amplitude, adjusting the value of the load D so that there are two PD signals triggered within a half-cycle; once the value of the load D becomes stable, the amplitude of the MEMS mirror is stable.