IP Library Granted Patent US 7,925,134
Granted Patent B2
US 7,925,134 · App. 12/164,711 · Granted Apr 12, 2011

Precision length standard for coherent laser radar

Assignee: Nikon Metrology NV
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Quick Facts
Patent No.
US 7,925,134
App. No.
12/164,711
Granted
Apr 12, 2011
Kind
B2
Abstract

This disclosure presents a version of a coherent laser radar system that is immune to environmental effects on Mach-Zehnder-configured interferometers and reference length standards comprising such systems. The present disclosure also describes methods and materials which alleviate interferometer drift due to vapor absorption using a polyimide coated polarization maintaining fiber to reduce the change in the length of a reference arm.

Claims (25)

1. A measurement system comprising:

two optical fibers, each optical fiber from said two optical fibers being coated with a substantially hydrophobic and substantially non-outgassing substance; one optical fiber from said two optical fibers having a length different from another optical fiber from said two optical fibers;

a first fiber optic coupler for

receiving electromagnetic (EM) radiation; and

splitting the EM radiation into a measurement path and a reference path;

said reference path including

a second fiber optic coupler for

receiving said EM radiation from the reference path; and

splitting said EM radiation into each of said two optical fibers;

a third fiber optic coupler for

receiving EM radiation from said two optical fibers; and

providing said received EM radiation to a single fiber; and

a detector for

calibrating, from said single fiber, a difference in length between said two optical fibers; and

calculating a distance along said measurement path as a function of said difference in length, wherein said reference path is in a Mach-Zehnder configuration, and said substantially hydrophobic and substantially con-outgassing substance is selected from polyimide, ultraviolet cured acrylate, teflon, tefzel, hytrel, or nylon.

2. A method for rendering the measurement of distance along an electromagnetic (EM) radiation measurement path insensitive to temperature variations and environmental fluctuations comprising the steps of:

coating two optical fibers, said two optical fibers disposed between a first fiber optic coupler and a second fiber optic coupler, with a substantially hydrophobic and substantially non-outgassing substance;

receiving EM radiation into a third fiber optic coupler;

splitting the received EM radiation into a measurement EM radiation and a reference EM radiation;

receiving the reference EM radiation into the first fiber optic coupler;

splitting, by the second fiber optic coupler, the received reference EM radiation into the two optical fibers;

receiving the two optical fibers into the second fiber optic coupler;

combining, by the second fiber coupler, combined EM radiation received from the two optical fibers and providing the combined EM radiation to a single fiber;

calibrating, from the combined EM radiation, a difference in length of between the two optical fibers; and

calculating a distance of the measurement EM radiation as a function of the difference in Length, wherein said reference path is in a Mach-Zehnder configuration, and said substantially hydrophobic and substantially con-outgassing substance is selected from polyimide, ultraviolet cured acrylate, teflon, tefzel, hytrel, or nylon.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 24, 2010
From: SLOTWINSKI, ANTHONY; BENNETT, ANDREW L.
To: METRIS USA INC.
Reel/Frame 025418/0330 →
CHANGE OF NAME Recorded Nov 18, 2010
From: METRIS U.S.A., INC.
To: NIKON METROLOGY, INC.
Reel/Frame 025371/0597 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 18, 2010
From: NIKON METROLOGY, INC.
To: NIKON METROLOGY NV
Reel/Frame 025371/0711 →
Continuity (3)
Continuation 11376351 · Mar 15, 2006
Provisional Application 60662367 · Mar 17, 2005
Related Publication 20090323077A1 · Dec 31, 2009