Methods to make sidewall light shields for color filter array
Methods of forming color filters having a light blocking material therebetween. A color filter is formed such that a trench is defined between a color filter and an adjacent color filter. The trench may be formed by exposing the color filter to polymerizing conditions such as, for example, ultraviolet radiation and heat. The trench may also be formed by etching between adjacent color filters. A material is formed within the trench.
1. A method of forming an integrated circuit, comprising:
forming a plurality of pixel cells by:
forming a plurality of photosensors arranged into a plurality of rows and columns in association with a substrate;
forming a respective color filter above each photosensor, at least two of said color filters separated from each other by a distance in the range of about 50 nm to about 200 nm; and
filling a space defined by the separation with a light blocking material, the step of filling the space performed by the act of spin-coating a light blocking material layer over the color filters,
wherein forming the color filters at a distance from one another further comprises forming at least two adjacent and abutting color filters, and contracting the color filters to form the space.
2. The method of claim 1 , wherein contracting the color filters is performed by exposing the color filters to polymerizing conditions.
3. The method of claim 2 , wherein the act of exposing the color filters to polymerizing conditions comprises exposure to ultraviolet radiation.
4. The method of claim 2 , wherein the act of exposing the color filters to polymerizing conditions comprises exposure to heat.
5. A method of forming an imager device, comprising:
providing an integrated circuit capable of capturing images, and having a plurality of pixel cells, the pixel cells formed by:
forming a plurality of photosensors arranged into a plurality of rows and columns in a substrate;
forming color filters over the photosensors, at least two of said color filters separated from each other by a predetermined distance such that respective sidewall regions of the color filters are exposed, said exposure of said sidewall regions occurring upon processing color filtered materials for respectively forming said color filters which causes said materials to contract and form said color filters;
forming a light shield over the sidewall regions of the color filters, the light shield formed by spin-coating an aluminum material layer over the color filters;
planarizing the light shields to expose a topmost surface of the color filters; and
providing read out circuitry for the pixel cells.
6. The method of claim 5 , wherein said processing exposes the color filter materials to polymerizing conditions.
7. The method of claim 6 wherein the act of exposing the color filter materials to polymerizing conditions comprises exposure to ultraviolet radiation.
8. The method of claim 6 , wherein the act of exposing the color filter materials to polymerizing conditions comprises exposure to heat.
9. The method of claim 5 , wherein the predetermined distance is in the range of about 50 nm to about 200 nm.
10. A method of forming an imager; comprising:
forming at least two adjacent color filters over respective photosensors by depositing respective color filter materials for each of the color filters and processing at least one of the respective color filter materials so it contracts to form a trench between said at least two adjacent color filters; and
forming a material within the trench to optically isolate the adjacent color filters.
11. A method as in claim 10 , wherein said processing comprises polymerization of the at least one color filter material.
12. A method as in claim 11 , wherein said polymerization occurs in the presence of heat.
13. A method as in claim 11 , wherein said polymerization occurs in the presence of ultraviolet radiation.
14. A method as in claim 10 , further comprising processing each of said respective color filter materials so they contract to form said trench.
15. A method as in claim 10 , wherein said respective color filter materials are deposited to abut one another.
16. A method as in claim 10 , wherein first, second and third color filters are formed by depositing respective first, second and third different color filter materials to abut one another and processing said first, second and third color filter materials so they contract to form trenches between adjacent color filters, said method further comprising forming said optically isolating material within said trenches to optically isolate adjacent color filters.