Microwave lens
View Patent ↗A microwave lens having an array of electronic inductive capacitive cells wherein each cell includes an electrically conductive pattern which responds to incident microwave electromagnetic energy as an LC resonator. At least one of the cells includes at least one MEMS device which is movable in response to an electrical bias to thereby vary the resonant frequency of that cell. In order to bias the MEMS device, an electrical insulating layer extends along a portion of the pattern of the cell and to both sides of the MEMS device. An electrically conductive strip then extends over the insulating layer so that the conductive strip is electrically insulated from the pattern while electrically connected to the MEMS device.
1. A metamaterial microwave lens comprising:
an array of electronic inductive capacitive cells, each cell having an electrically conductive pattern which responds to incident microwave electromagnetic energy as an LC resonator, said electrically conductive pattern disposed on a substrate,
at least one of said cells including at least one MEMS device having two sides and movable in response to an electrical bias between at least two positions to thereby vary the resonant frequency of said at least one cell,
an electrical insulating layer extending along and over only a portion of said pattern of said at least one cell, said insulating layer extending to said MEMS device,
an electrically conductive strip extending over said insulating layer such that said conductive strip is electrically insulated from said pattern, the sides of said conductive strip being spaced inwardly from sides of said pattern so that said conductive strips overlie only a portion of said pattern, said conductive strip being electrically connected to said sides of said MEMS device and said insulating layer being sandwiched between said conductive strip and said conductive pattern.
2. The invention as defined in claim 1 wherein said electrical insulating material comprises polysilicon.
3. The invention as defined in claim 1 wherein said pattern of said at least one cell comprises a central inductive leg and two side capacitive legs spaced from said inductive leg and wherein one said MEMS device is associated with each capacitive leg.
4. The invention as defined in claim 3 wherein each said MEMS device comprises a cantilever conductor which, upon actuation, varies the capacitance of the side legs.
5. The invention as defined in claim 1 wherein a plurality of cells in said array include at least one MEMS device.