Method for fabricating a liquid crystal display device and an LCD device thereby
A method for fabricating a LCD having enhanced aperture ratio and brightness includes: forming a gate line, a gate electrode, a common electrode and a common line in a first mask process; depositing a gate insulating layer covering the gate line, the gate electrode and the common electrode; forming an active layer on the gate insulating layer, and an ohmic contact layer on the active layer in a second mask process; forming a data line, a source electrode, and a drain electrode facing the source electrode in a third mask process; depositing a protective layer over the data line, the source electrode and the drain electrode; forming a pixel contact hole in a fourth mask process; and forming a pixel electrode, wherein the pixel electrode is connected to the drain electrode through the pixel contact hole in a fifth mask process using a reverse tapered photo-resist pattern.
1. A method for fabricating a liquid crystal display device, comprising:
forming a gate line and a gate pad at the end of gate line, a gate electrode connected to the gate line, a common electrode and a common line connected to the common electrode on a substrate in a first mask process;
depositing a gate insulating layer on the substrate to cover the gate line, the gate electrode and the common electrode;
forming an active layer on the gate insulating layer, the active layer overlapping the gate electrode to form a channel layer, and forming an ohmic contact layer on the active layer in a second mask process;
forming a data line crossing the gate line to define a pixel region, a data pad at an end of the data line, a source electrode connected to the data line, and a drain electrode facing the source electrode in a third mask process;
depositing a protective layer over the data line, the source electrode and the drain electrode;
forming a pixel contact hole that exposes the drain electrode by penetrating the protective layer in a fourth mask process; and
forming a pixel electrode that generates a horizontal electric field with the common electrode in the pixel region, wherein the pixel electrode is connected to the drain electrode through the pixel contact hole in a fifth mask process using a reverse tapered photo-resist pattern wherein at least one of the pixel electrode, common electrode, the gate line, the data line and the common line, the gate electrode, the source electrode, the drain electrode has a line width of about 1.5.about.4.0.mu.m.
2. The method for fabricating a liquid crystal display device according to the claim 1 , wherein the first mask process uses a reverse tapered photo-resist pattern.
3. The method for fabricating a liquid crystal display device according to the claim 1 , wherein the second mask process uses a reverse tapered photo-resist pattern.
4. The method for fabricating a liquid crystal display device according to the claim 1 , wherein the third mask process uses a reverse tapered photo-resist pattern.
5. The method for fabricating a liquid crystal display device according to the claim 1 , wherein the fourth mask process uses a reverse tapered photo-resist pattern.
6. The method for fabricating a liquid crystal display device according to the claim 1 , wherein the reverse tapered photo-resist pattern has a bottom width of about 4.5 μm.
7. The method for fabricating a liquid crystal display device according to the claim 1 , wherein the reverse tapered photo-resist pattern is formed by steps of:
depositing photo-resist on the substrate;
baking the photo-resist with controlling temperature for the photo-resist pattern to have reverse tapered shape and;
exposing the photo-resist with adjusting defocus amount and exposure amount for patterning the photo-resist to have reverse tapered shape.