Adhesive tape cutting method and adhesive tape joining apparatus using the same
In a state that a reference plane of a cutter holder, to which a cutter blade is attached, is brought into contact with a surface of a base of a supporting adhesive tape, the cutter blade cuts the supporting adhesive tape while the reference plane of the cutter holder follows the surface of the base. Herein, a cutting edge of the cutter blade passes by a joining interface between the supporting adhesive tape and a ring frame without penetrating through an adhesive layer of the supporting adhesive tape.
1. A method for cutting a supporting adhesive tape through which a ring frame holds a semiconductor wafer, the method comprising the steps of:
cutting an adhesive tape along a contour of a ring frame while maintaining constant a distance from a reference plane of a cutter holder, which is an attachment base end of a cutter blade, to a cutting edge of the cutter blade penetrating through the adhesive tape joined to the ring frame and bringing the cutting edge of the cutter blade close to the ring frame;
measuring a distance from the reference plane to the cutting edge of the cutter blade with a measuring device each time the adhesive tape is cut by a predetermined number of times while the adhesive tape is cut with the cutter blade; and
maintaining the distance from the reference plane to the cutting edge of the cutter blade constant by adjusting a length of the cutter blade protruding from an oval hole of the cutter holder in accordance with a result of the measurement.
2. A method for cutting a supporting adhesive tape through which a ring frame holds a semiconductor wafer, the method comprising the steps of
measuring a thickness of an adhesive tape on a cutting pathway of a cutter blade while cutting the adhesive tape with the cutter blade;
adjusting a length of the cutter blade protruding from an oval hole of the cutter holder in accordance with a result of the measurement; and
continuing cutting the adhesive tape while maintaining the distance from the reference plane to the cutting edge of the cutter blade constant by adjusting a length of the cutter blade protruding from an oval hole of the cutter holder in accordance with a result of the measurement.
3. The method of claim 2 , wherein
light is emitted to the adhesive tape, both light which transmits through the adhesive tape and is reflected from the ring frame and light which is reflected from a surface of the adhesive tape are received, and the thickness of the adhesive tape is measured on the basis of at least one of intensity and timing of the reflected light.
4. The method of claim 1 , wherein
light is emitted to the adhesive tape, both light which transmits through the adhesive tape and is reflected from the ring frame and light which is reflected from a surface of the adhesive tape are received, and a thickness of the adhesive tape is measured on the basis of at least one of intensity and timing of the reflected light.