Light-emitting apparatus and production method thereof
Provided is a light-emitting apparatus which can prevent a shadow mask from contacting a light-emitting medium to suppress damage of the medium, by using a conductive layer formed on a device isolation layer as a pressing member for the shadow mask, and can attain more secure conduction between a second electrode and an auxiliary electrode. A production method of the light-emitting apparatus includes forming first electrodes and auxiliary electrodes on a substrate; forming a device isolation layer between the first electrodes and forming an opening on each of the first electrodes and the auxiliary electrodes; forming a conductive layer on the device isolation layer so as to cover the openings above the auxiliary electrodes; bringing a shadow mask into contact with the conductive layer and forming a light-emitting medium in a thickness smaller than the thickness of the conductive layer; and forming a second electrode so as to cover the light-emitting medium, the device isolation layer, and the conductive layer.
1. A method of producing a light-emitting apparatus having a plurality of light-emitting devices each having a first electrode, a second electrode, and a light-emitting medium between the first electrode and the second electrode on a substrate; a device isolation layer formed between the plurality of light-emitting devices;
and an auxiliary electrode electrically connected to the second electrode, the method comprising:
forming the first electrode and the auxiliary electrode on the substrate;
forming the device isolation layer by forming a layer over the first electrode and the auxiliary electrode and, thereafter, forming an opening in the layer on each of the first electrode and the auxiliary electrode;
forming a conductive layer on the device isolation layer so as to cover the opening above the auxiliary electrode;
bringing a shadow mask into contact with the conductive layer and forming the light-emitting medium in a thickness smaller than the thickness of the conductive layer so as to cover the opening above the first electrode; and
forming the second electrode so as to cover the light-emitting medium, the device isolation layer, and the conductive layer.
2. The production method according to claim 1 , wherein the formation of the light-emitting medium comprises forming a plurality of layers using a plurality of shadow masks with different mask opening patterns.
3. The production method according to claim 1 , wherein the formation of the conductive layer is performed by a vapor deposition method using a mask.
4. The production method according to claim 1 , wherein the formation of the light-emitting medium comprises forming the light-emitting medium which covers a part of an upper portion of the device isolation layer.
5. A method of producing a light-emitting apparatus having a plurality of light-emitting devices each having a first electrode, a second electrode, and a light-emitting medium between the first electrode and the second electrode on a substrate; a device isolation layer formed between the plurality of light-emitting devices; and an auxiliary electrode electrically connected to the second electrode, the method comprising:
forming the first electrode and the auxiliary electrode on the substrate;
forming the device isolation layer by forming a layer over the first electrode and the auxiliary electrode and, thereafter, forming an opening in the layer on each of the first electrodes and the auxiliary electrode;
forming a conductive layer on the device isolation layer so as to cover the openings above the auxiliary electrode;
forming the light-emitting medium in which a shadow mask abuts the conductive layer so as to cover the opening above the first electrode, and the thickness of the conductive layer is larger than the light-emitting medium; and
forming the second electrode so as to cover the light-emitting medium, the device isolation layer, and the conductive layer.
6. A method of producing a light-emitting apparatus having a plurality of light-emitting devices each having a first electrode, a second electrode, and a light-emitting medium between the first electrode and the second electrode on a substrate; a device isolation layer formed between the plurality of light-emitting devices;
and an auxiliary electrode electrically connected to the second electrode, the method comprising:
forming the first electrode and the auxiliary electrode on the substrate;
forming the device isolation layer by forming a layer over the first electrode and the auxiliary electrode and, thereafter, forming an opening in the layer on each of the first electrodes and the auxiliary electrodes;
forming a conductive layer on the device isolation layer so as to cover the openings above the auxiliary electrodes;
bringing a shadow mask into contact with the conductive layer and forming a light-emitting medium so as to cover the opening above the first electrode; and
forming the second electrode so as to cover the light-emitting medium, the device isolation layer, and the conductive layer.
7. The production method according to any one of claims 1 , 5 , and 6 , wherein the forming the first electrode and the auxiliary electrode on the substrate step comprises:
forming a transistor on the substrate;
forming a planarization layer on the transistor; and
forming the first electrode and the auxiliary electrode on the planarization layer.