Selectively depositing aluminum in a replacement metal gate process
A method for carrying out a replacement metal gate process comprises providing a transistor in a reactor, wherein the transistor includes a gate stack, removing at least a portion of the gate stack to expose a surface of a barrier layer, causing a temperature of the reactor be less than or equal to 150° C., introducing methylpyrrolidine:alane (MPA) proximate to the surface of the barrier layer, and carrying out a CVD process to deposit aluminum metal on the barrier layer using a bottom-up deposition mechanism.
1. A MOS transistor comprising:
a gate stack that comprises:
a high-k gate dielectric layer formed on a substrate,
a workfunction metal layer formed on the gate dielectric layer,
a barrier layer formed in the workfunction metal layer,
an aluminum containing seed layer formed on the barrier layer from MPA, and
an aluminum metal layer on the seed layer;
a pair of spacers formed on laterally opposite sides of the gate stack; and
a source region and a drain region formed in the substrate.
2. The MOS transistor of claim 1 , wherein the high-k gate dielectric layer comprises hafnium oxide, hafnium silicon oxide, lanthanum oxide, lanthanum aluminum oxide, zirconium oxide, zirconium silicon oxide, tantalum oxide, titanium oxide, barium strontium titanium oxide, barium titanium oxide, strontium titanium oxide, yttrium oxide, aluminum oxide, lead scandium tantalum oxide, or lead zinc niobate.
3. The MOS transistor of claim 1 , wherein the workfunction metal layer comprises hafnium, zirconium, titanium, tantalum, aluminum, titanium carbide, zirconium carbide, tantalum carbide, hafnium carbide, aluminum carbide, ruthenium, palladium, platinum, cobalt, nickel, or ruthenium oxide.
4. The MOS transistor of claim 1 , wherein the aluminum metal layer is formed using a CVD process at a process temperature at or below 150° C.
5. The MOS transistor of claim 1 , wherein the substrate comprises bulk silicon, a silicon-on-insulator substructure, germanium, indium antimonide, lead telluride, indium arsenide, indium phosphide, gallium arsenide, or gallium antimonide.