Convective accelerometer
A convective accelerometer capable of measuring linear or angular acceleration, velocity, or angle of inclination is provided. The accelerometer comprises sensing elements that are sensitive to convection located inside a sealed housing containing a liquid agent. Applied external acceleration causes forced convection of the liquid agent, which produces variations in an electric current produced by the sensing elements that are proportional to the applied acceleration or angle of inclination. The accelerometer has a small size, extremely wide frequency and dynamic ranges, high sensitivity, simple design and is suitable for mass production. The device has a wide range of application, such as stabilization and control systems, homeland security, and oil exploration.
1. A method of manufacturing a sensing element for a convective accelerometer, the method comprising
providing a plurality of conductive members;
providing a plurality of dielectric spacers;
arranging the conductive members and the dielectric spacers such that adjacent conductive members are separated by a dielectric spacer with no gaps therebetween;
creating a plurality of holes in the dielectric spacers and the conductive members;
wherein the holes in the dielectric spacers and the holes in the conductive members are coincident, and wherein the diameter of the holes in the dielectric spacer have a diameter between about one and about 300 microns.
2. The method according to claim 1 , wherein the conductive members comprises metal plates.
3. The method according claim 1 , wherein the dielectric spacers comprises an oxide or a fluoride of the fourth group of the Periodic Table.
4. The method according to claim 3 , wherein the dielectric spacer comprises quartz, forsterite or glass.
5. The method according to claim 4 , wherein the dielectric spacer comprises glass.
6. The method according to claim 1 , wherein the holes in the dielectric spacers are formed by laser drilling.
7. The method according to claim 1 , wherein the holes in the conductive members are formed by laser drilling.
8. The method according to claim 1 , wherein each of the dielectric spacers has a thickness in the range of about 0.5 to about 150 microns.
9. The method according to claim 8 , wherein each of the dielectric spacers has a thickness in the range of about 1 to about 10 microns.
10. The method according to claim 1 , wherein each of the conductive members has a thickness of about 30 microns.