Semiconductor device fabricating method
View Patent ↗A semiconductor device fabricating method is described. The semiconductor device fabricating method includes providing a substrate. A first gate insulating layer and a second gate insulating layer are formed on the substrate, respectively. A gate layer is blanketly formed. A portion of the gate layer, the first gate insulating layer and the second gate insulating layer are removed to form a first gate, a remaining first gate insulating layer, a second gate and a remaining second gate insulating layer. The remaining first gate insulating layer not covered by the first gate has a first thickness, and the remaining second gate insulating layer not covered by the second gate has a second thickness, wherein a ratio between the first thickness and the second thickness is about 10 to 20. A pair of first spacers and a pair of second spacers are formed on sidewalls of the first gate and the second gate, respectively.
1. A method for fabricating a semiconductor device, comprising:
providing a substrate having a first device region and a second device region;
forming a first gate insulating layer and a second gate insulating layer in the first device region and the second device region, respectively;
blanketly forming a gate layer;
patterning the gate layer by removing a portion of the first gate insulating layer and the second gate insulating layer to form a first gate and a remaining first gate insulating layer in the first device region, and form a second gate and a remaining second gate insulating layer in the second device region, wherein the remaining first gate insulating layer not covered by the first gate has a first thickness, and the remaining second gate insulating layer not covered by the second gate has a second thickness;
blanketly forming a spacer insulating layer having a third thickness; and
performing an anisotropic etching process to remove a portion of the spacer insulating layer, a portion of the remaining first gate insulating layer, and a portion of the remaining second gate insulating layer, such that tops of the first gate and the second gate are exposed, a pair of first spacers and a pair of second spacers are left on sidewalls of the first gate and the second gate, and a portion of the substrate is exposed, wherein the anisotropic etching process is performed without masks shielding the first spacers and the second spacers;
wherein the first spacers cover a portion of the remaining first gate insulating layer and the second spacers cover a portion of the remaining second gate insulating layer.
2. The method for fabricating the semiconductor device as claimed in claim 1 , further comprising:
forming a first lightly doped source/drain region and a second lightly doped source/drain region in a portion of the substrate on opposite sides of the first gate and the second gate, respectively; and
forming a first heavily doped source/drain region and a second heavily doped source/drain region in a portion of the substrate outside of the first spacers and the second spacers, respectively.
3. The method for fabricating the semiconductor device as claimed in claim 2 , wherein the first heavily doped source/drain region and the second heavily doped source/drain region are formed in different process steps.
4. The method for fabricating the semiconductor device as claimed in claim 1 , wherein the third thickness and the first thickness have a ratio of 10:1 to 25:1.
5. The method for fabricating the semiconductor device as claimed in claim 1 , wherein the third thickness and the second thickness have a ratio of 2:1 to 10:1.
6. The method for fabricating the semiconductor device as claimed in claim 1 , wherein the first gate insulating layer and the second gate insulating layer are formed in different process steps.
7. The method for fabricating the semiconductor device as claimed in claim 1 , wherein the first thickness is thinner than a thickness of the remaining first gate insulating layer covered by the first gate.
8. The method for fabricating the semiconductor device as claimed in claim 1 , wherein the second thickness is thinner than a thickness of the remaining second gate insulating layer covered by the second gate.
9. The method for fabricating the semiconductor device as claimed in claim 1 , wherein the first thickness and the second thickness have a ratio of 1:5 to 1:20.