Method of fabricating a thin film transistor using boron-doped oxide semiconductor thin film
View Patent ↗Provided is a method of fabricating a thin film transistor including source and drain electrodes, a novel channel layer, a gate insulating layer, and a gate electrode, which are formed on a substrate. The method includes the steps of forming the channel layer using an oxide semiconductor doped with boron; and patterning the channel layer. The channel layer formed is an oxide semiconductor thin film doped with boron. The electrical characteristics and high temperature stability of the thin film transistor are improved remarkably.
1. A method of fabricating a thin film transistor in which source and drain electrodes, a channel layer, a gate insulating layer, and a gate electrode are formed on a substrate, the method comprising the steps of:
forming said channel layer comprised of an oxide semiconductor doped with boron in which the oxide semiconductor is formed of at least one metal oxide selected from the group consisting of ZnO, In—Zn—O, Zn—Sn—O, In—Ga—ZnO, Zn—In—Sn—O, In—Ga—O, and SnO 2 , and the boron is present in the oxide semiconductor in an amount ranging from 0.001 to 10 at % of total atomic weight of a metal atom of the metal oxide constituting the oxide semiconductor; and
patterning the channel layer.
2. The method according to claim 1 , further comprising forming a channel protection layer comprised of an insulating material on the channel layer, wherein the channel protection layer is patterned together with the channel layer.
3. The method according to claim 2 , wherein forming the channel layer is performed by one of sputtering, pulse laser deposition (PLD) and ion-beam deposition.
4. The method according to claim 2 , wherein the channel protection layer has a thickness ranging from about 1 to about 20 nm, and wherein forming the channel protection layer is performed by one of chemical vapor deposition (CVD), atomic layer deposition (ALD), and sputtering using at least one insulating material selected from the group consisting of AlOx, SiNx, and SiOx.
5. The method according to claim 2 , wherein patterning the channel layer and the channel protection layer is performed using photoresist, and etching by one of dry etching, wet etching, and ion milling.
6. The method according to claim 2 , wherein patterning the channel layer and the channel protection layer is performed by forming a lift-off pattern using photoresist, and applying the photoresist at a temperature of less than 150° C.
7. The method according to claim 2 , further comprising annealing the channel layer at a temperature ranging from 200 to 400° C.
8. The method according to claim 7 , wherein forming the channel layer is performed by one of sputtering, pulse laser deposition (PLD) and ion-beam deposition, and wherein the channel protection layer has a thickness ranging from about 1 to about 20 nm, and wherein forming the channel protection layer is performed by one of chemical vapor deposition (CVD), atomic layer deposition (ALD), and sputtering using at least one insulating material selected from the group consisting of AlOx, SiNx, and SiOx.
9. The method according to claim 7 , wherein patterning the channel layer and the channel protection layer is performed by one of (a) using photoresist, and etching by dry etching, wet etching, or ion milling, or (b) forming a lift-off pattern using photoresist, and applying the photoresist at a temperature of less than 150° C.
10. The method according to claim 1 , wherein forming the channel layer is performed by one of sputtering, pulse laser deposition (PLD) and ion-beam deposition.
11. The method according to claim 1 , wherein patterning the channel layer is performed using photoresist, and etching by one of dry etching, wet etching, and ion milling.
12. The method according to claim 1 , wherein patterning the channel layer is performed by forming a lift-off pattern using photoresist, and applying the photoresist at a temperature of less than 150° C.
13. The method according to claim 1 , wherein forming the channel layer is performed by one of sputtering, pulse laser deposition (PLD), and ion-beam deposition, and wherein patterning the channel layer is performed by one of (a) using photoresist, and etching by one of dry etching, wet etching, and ion milling, and (b) forming a lift-off pattern using photoresist, and applying the photoresist at a temperature of less than 150° C.
14. The method according to claim 1 , further comprising the steps of annealing the channel layer at a temperature ranging from 200 to 400° C.; and forming a channel protection layer on the channel layer using an insulating material, wherein the channel protection layer is patterned together with the channel layer.
15. The method according to claim 14 , wherein the channel protection layer has a thickness ranging from about 1 to about 20 nm, and wherein forming the channel protection layer is performed by one of chemical vapor deposition (CVD), atomic layer deposition (ALD), and sputtering using at least one insulating material selected from the group consisting of AlOx, SiNx, and SiOx.
16. The method according to claim 14 , wherein patterning the channel layer and the channel protection layer is performed by one of (a) using photoresist, and etching by one of dry etching, wet etching, and ion milling, and (b) forming a lift-off pattern using photoresist, and applying the photoresist at a temperature of less than 150° C.