Method for manufacturing group III nitride semiconductor layer, method for manufacturing group III nitride semiconductor light-emitting device, and group III nitride semiconductor light-emitting device, and lamp
A method for manufacturing a Group III nitride semiconductor layer according to the present invention includes a sputtering step of disposing a substrate and a target containing a Group III element in a chamber, introducing a gas for formation of a plasma in the chamber and forming a Group III nitride semiconductor layer added with Si as a dopant on the substrate by a reactive sputtering method, wherein a Si hydride is added in the gas for formation of a plasma.
1. A method for manufacturing a Group III nitride semiconductor layer, which comprises:
a sputtering step of disposing a substrate and a target containing a Group Ill element in a chamber, introducing a gas for formation of a plasma in the chamber, and forming the Group III nitride semiconductor layer in which Si has been added as a dopant, on the substrate by a reactive sputtering method;
wherein a Si hydride is added in the gas for formation of a plasma; and
the sputtering step comprises:
a first plasma generation step of adding the Si hydride in the gas for formation of a first plasma, which contains no nitrogen element, introducing the gas in the chamber and sputtering the target, thereby generating the first plasma containing sputtering particles comprised of at least a Group III element, and
a second plasma generation step of introducing the gas for formation of a second plasma, which contains at least a nitrogen element, in the chamber and generating the second plasma containing at least the nitrogen element;
wherein the Group III nitride semiconductor layer is formed by performing the first plasma generation step and the second plasma generation step repeatedly and alternately.
2. The method for manufacturing the Group III nitride semiconductor layer according to claim 1 , wherein the Si hydride is SiH 4 or Si 2 H 6 .
3. The method for manufacturing the Group III nitride semiconductor layer according to claim 1 , wherein the Group III element constituting the target is Al or Ga.
4. The method for manufacturing the Group III nitride semiconductor layer according to claim 1 , wherein the additive amount of Si is controlled by controlling a flow rate of the Si hydride to be added in the gas for formation of a plasma.