IP Library › Granted Patent US 8,092,739
Granted Patent B2
US 8,092,739 · App. 12/277,900 · Granted Jan 10, 2012

Retro-percussive technique for creating nanoscale holes

Assignee: Wisconsin Alumni Research Foundation
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Quick Facts
Patent No.
US 8,092,739
App. No.
12/277,900
Granted
Jan 10, 2012
Kind
B2
Abstract

A method of forming extremely small pores in glass or a similar substrate, useful, for example, in patch clamp applications, that employs a backer plate to contain energy of a laser-induced ablation through the front surface of the substrate so as to create a rear surface shock wave providing a fire polishing of the exit aperture of the pore such as produces improved sealing with cell membranes.

Claims (12)

1. A method of creating nanoscale holes comprising the steps of:

(a) creating a layered structure comprising a substrate material receiving the nanoscale hole and a shock wave containing backer material adjacent to a rear face of the substrate material;

(b) applying a focused laser in a direction of laser transmission and for a first period to a front face of the substrate material to ablate a first crater opening at the front face of the substrate material and extending into the substrate material by an amount less than a thickness of the substrate material;

(c) applying the focused laser in the direction of laser transmission through the front surface and for a second period to heat material beyond the first crater to produce a shock wave generating a second crater starting at the rear face of the substrate material and extending into the substrate material in a direction that opposes the direction of laser transmission and to connect with the first crater thereby creating an opening between the first and second crater having a hole diameter wherein the second crater has a diameter at the rear face larger than the hole diameter.

2. The method of claim 1 wherein in the hole diameter is less than 1000 nm.

3. The method of claim 1 wherein the substrate material is transparent.

4. The method of claim 3 wherein the substrate material is borosilicate glass.

5. The method of claim 1 further including the step of pre-forming pockets in the front face of the substrate material and wherein the first crater is substantially centered within the pockets.

6. The method of claim 1 wherein the material that is heated includes a volatilizable substance.

7. The method of claim 6 wherein the volatilizable substance is a liquid and includes spacers between the substrate material and the backer material defining the thickness of the volatilizable substance.

8. The method of claim 1 wherein the focused laser is applied so that the second crater reaches melting temperatures to create a fire polished surface.

9. The method of claim 1 wherein the laser has a frequency of 192 to 157 nm.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 29, 2009
From: BLICK, ROBERT H; YU, MINRUI; KIM, HYUN-SEOK; QIN, HUA
To: WISCONSIN ALUMNI RESEARCH FOUNDATION
Reel/Frame 022884/0858 →
Continuity (1)
Related Publication 20100129603A1 · May 27, 2010