Processing apparatus and heater unit
A processing apparatus has a placement stage that prevents generation of a crack due to heating of an embedded heater. The placement stage ( 32 A) on which a wafer (W) is placed has a plurality of areas ( 32 Aa, 32 Ab) so that one of the plurality of heaters is embedded independently in each of the plurality of areas. The heater ( 35 Aa) embedded in one area ( 32 Aa) of adjacent areas has a part ( 35 Aa 2 ) extending in the other area ( 32 Ab) of the adjacent areas, and the heater ( 35 Ab) embedded in the other area ( 32 Ab) of the adjacent areas has a part ( 35 Ab 2 ) extending in the one area ( 32 Aa).
1. A processing apparatus for applying a process while heating an object to be processed, comprising:
a processing container;
a placement stage arranged in the processing container and on which said object to be processed is placed; and
a plurality of heaters embedded within a single plane of the placement stage for heating said object to be processed placed by heating said placement stage,
wherein said placement stage has a plurality of areas so that one of said plurality of heaters is embedded independently in each of the plurality of areas, and said heater embedded in one of adjacent areas has a part extending in the other of the adjacent areas,
wherein said heater embedded in the other of the adjacent areas has a part extending in said one of the adjacent areas, and
wherein at least a part of the two heaters in said adjacent areas extend by reciprocating between said adjacent areas while maintaining a positional relationship so as to be close to but not in contact with each other.
2. The processing apparatus as claimed in claim 1 , wherein said placement stage is disk-shaped, and said plurality of areas are concentric areas divided in a radial direction of the placement stage, and the heaters embedded in an outer area and the heaters embedded in an inner area of adjacent areas of the concentric areas have parts that alternately enter in a vicinity of a boundary between the outer area and the inner area.
3. The processing apparatus as claimed in claim 1 , wherein said placement stage is made of a ceramic material, and said heaters are made of a resistance heating metal of a linear-shape or coil-shape.
4. The processing apparatus as claimed in claim 3 , wherein said ceramic material is selected from the group consisting of AlN, Al 2 O 3 , SiC and SiO 2 .
5. The processing apparatus as claimed in claim 3 , wherein said heaters are printed pattern heaters.
6. The processing apparatus as claimed in claim 3 , wherein said resistance heating metal is a metal selected from the group consisting of elementary substances of molybdenum, vanadium, chrome, manganese, niobium, tantalum, nickel, tungsten and an alloy of the aforementioned.
7. A heater unit for heating an object to be processed, wherein the heater unit has a plurality of areas and a heater is independently embedded in each of the plurality of areas, and said heater embedded in one of adjacent areas has a part extending in the other of the adjacent areas, and said heater embedded in the other of the adjacent areas has a part extending in said one of the adjacent areas and wherein at least a part of the two heaters in said adjacent areas extend by reciprocating between said adjacent areas while maintaining a positional relationship so as to be close to but not in contact with each other.
8. The heating unit as claimed in claim 7 , wherein said plurality of areas are concentric areas divided in a radial direction and the heaters embedded in an outer area and the heaters embedded in an inner area of adjacent areas of the concentric areas have parts that alternately enter in a vicinity of a boundary between the outer area and the inner area.
9. The heater unit as claimed in claim 7 , wherein said heaters are made of a resistance heating metal of a linear-shape or coil-shape.
10. The heater unit as claimed in claim 7 , wherein said heaters are printed pattern heaters.
11. The heater unit as claimed in claim 9 , wherein said resistance heating metal is a metal selected from the group consisting of elementary substances of molybdenum, vanadium, chrome, manganese, niobium, tantalum, nickel, tungsten and an alloy of the aforementioned.