Apparatus and method for the determination of the position of a disk-shaped object

1. An apparatus for the determination of the position of a disc-shaped object, particularly of a wafer, comprising a movable carrier; a mount for supporting a sensor device; and a sensor device provided on the mount wherein the mount is positioned at the movable carrier;

wherein the mount is an optical sensor device, particularly CCD sensors;

wherein at least four CCD sensors are provided on the mount;

wherein the mount is provided with a first arm and a second arm and a first pair of the CCD sensors being positioned on the first arm and a second pair of the CCD sensors being positioned on the second arm;

wherein the CCD sensors, which are positioned on the first arm, are offset relative to each other in direction of the arm axis; and

wherein the CCD sensors, which are positioned on the second arm, are offset relative to each other in direction of the arm axis.

2. The apparatus of claim 1 , wherein the movable carrier is a robot arm of an end effector module.

3. The apparatus of claim 1 , wherein the mount is provided with a connecting arm for connecting the mount with the movable carrier and with a sensor plate, onto which the sensor device is mounted.

4. The apparatus of claim 1 , wherein the mount is having an evaluation system, with which an evaluation of the position of the wafer can be carried out on the mount.

5. A method for the determination of the position of a disc-shaped object, in particular of a wafer, on a movable carrier, comprises the following steps:

positioning the disc-shaped object on the movable carrier, wherein a mount is attached to a movable carrier;

generating a signal with a sensor device which is provided on the mount;

determining data from the signal wherein said data suggest geometric parameter, particularly the position of the edge of the disc-shaped object or of the center point of the disc-shaped object;

wherein the mount is an optical sensor device, particularly CCD sensors;

wherein at least four CCD sensors are provided on the mount;

wherein the mount is provided with a first arm and a second arm and a first pair of the CCD sensors being positioned on the first arm and a second pair of the CCD sensors being positioned on the second arm;

wherein the CCD sensors, which are positioned on the first arm, are offset relative to each other in direction of the arm axis; and

wherein the CCD sensors, which are positioned on the second arm, are offset relative to each other in direction of the arm axis.

6. The method of claim 5 , wherein the signal is generated in such a way that the mount moves with the disc-shaped object in a measuring position, in which the illumination of the optical elements is carried out.

7. The method of claim 6 , wherein from the signal it is determined by an evaluation, if or which parts of the optical elements are shadowed by the disc-shaped object during illumination.

8. The method of claim 5 wherein the determined geometric data are analyzed for being within a predetermined range.

9. The method of claim 8 , wherein the disc-shaped object is positioned again on the movable carrier or an error is displayed, if the determined geometric data are outside the predetermined range.