Double self-aligned metal oxide TFT
View Patent ↗A method of fabricating metal oxide TFTs on transparent substrates includes the steps of positioning an opaque gate metal area on the front surface of the substrate, depositing transparent gate dielectric and transparent metal oxide semiconductor layers overlying the gate metal and a surrounding area, depositing transparent passivation material on the semiconductor material, depositing photoresist on the passivation material, exposing and developing the photoresist to remove exposed portions, etching the passivation material to leave a passivation area defining a channel area, depositing transparent conductive material over the passivation area, depositing photoresist over the conductive material, exposing and developing the photoresist to remove unexposed portions, and etching the conductive material to leave source and drain areas on opposed sides of the channel area.
1. Metal oxide TFTs on transparent substrates comprising:
a transparent substrate having a front surface and a rear surface;
opaque gate metal positioned on the front surface of the substrate to define a gate area for a TFT;
a layer of transparent gate dielectric deposited on the front surface of the substrate overlying the gate metal and a surrounding area and a layer of transparent metal oxide semiconductor material deposited on the surface of the layer of transparent gate dielectric;
a layer of passivation material deposited on the layer of metal oxide semiconductor material;
exposed portions of the layer of passivation material removed to leave a passivation area defining a channel area for the TFT overlying the gate area; and
conductive material deposited on the layer of metal oxide semiconductor material to form source and drain areas on opposed sides of the channel area using the opaque gate metal as a mask from the rear surface of the substrate.
2. Metal oxide TFTs on transparent substrates as claimed in claim 1 wherein the layer of passivation material includes a positive working photoresist layer.
3. Metal oxide TFTs on transparent substrates as claimed in claim 2 wherein the passivation layer includes a patternable material as the layer of passivation material.
4. Metal oxide TFTs on transparent substrates as claimed in claim 1 wherein the conductive material includes one of a subtractive material deposited by a subtractive process and an additive material deposited by an additive process.
5. Metal oxide TFTs on transparent substrates as claimed in claim 4 wherein the subtractive material includes a layer of transparent conductive material.
6. Metal oxide TFTs on transparent substrates as claimed in claim 5 wherein the layer of transparent conductive material includes one of a transparent conductive metal oxide, a transparent layer of thin metal, and a transparent organic layer.
7. Metal oxide TFTs on transparent substrates as claimed in claim 4 wherein the subtractive material includes a coating of negative working photoresist on the surface of the layer of transparent conductive material.
8. Metal oxide TFTs on transparent substrates as claimed in claim 4 wherein the additive material includes one of Pt, Pd, and Au and a further includes conductive nanoparticles embedded in negative working photo polymer matrix.
9. Metal oxide TFTs fabricated on transparent substrates comprising:
a transparent substrate having a front surface and a rear surface;
opaque gate metal positioned on the front surface of the substrate to define a gate area for a TFT;
a layer of transparent gate dielectric deposited on the front surface of the substrate overlying the gate metal and a surrounding area and a layer of transparent metal oxide semiconductor material deposited on the surface of the layer of transparent gate dielectric;
a layer of transparent passivation material deposited on the layer of metal oxide semiconductor material and processed using an etch mask to define portions of the layer of passivation material defining a channel area for the TFT overlying the gate area; and
conductive material deposited over the layer of transparent metal oxide semiconductor material and processed to provide source and drain areas on opposed sides of the channel area.
10. Metal oxide TFTs fabricated on transparent substrates as claimed in claim 9 wherein a layer of positive photoresist is deposited over the layer of passivation material overlying the gate metal and exposed to form the etch mask.
11. Metal oxide TFTs fabricated on transparent substrates as claimed in claim 9 wherein the layer of transparent passivation material includes one of a spin coat, a spray coat, and a slot coat of one of polymer PMGI, spin on glass, and thermal evaporation of one of MgF 2 , TaO, and SiO 2 .
12. Metal oxide TFTs fabricated on transparent substrates as claimed in claim 9 wherein the layer of transparent metal oxide semiconductor material includes one of ZnO, InO, AlZnO, ZnInO, InAlZnO, InGaZnO, ZnSnO, GaSnO, InGaCuO, InCuO, and AlCuO.
13. Metal oxide TFTs fabricated on transparent substrates as claimed in claim 9 wherein the conductive material is deposited by one of a subtractive process and an additive process.
14. Metal oxide TFTs fabricated on transparent substrates as claimed in claim 13 wherein the conductive material using the subtractive process includes a layer of transparent conductive material.
15. Metal oxide TFTs fabricated on transparent substrates as claimed in claim 14 wherein the layer of transparent conductive material includes one of a transparent conductive metal oxide, a transparent layer of thin metal, and a transparent organic layer.
16. Metal oxide TFTs fabricated on transparent substrates as claimed in claim 13 wherein the conductive material using the subtractive process includes a coating of negative working photoresist on the surface of the layer of transparent conductive material.
17. Metal oxide TFTs fabricated on transparent substrates as claimed in claim 13 wherein the conductive material using the additive process includes one of Pt, Pd, and Au and further includes conductive nanoparticles embedded in negative working photo polymer matrix.