Film forming apparatus and method for manufacturing light emitting element
A film forming apparatus is provided with a processing chamber having a substrate holding table for holding a substrate to be processed inside the container; a gas material generation unit arranged outside the processing chamber, for generating a gas material by evaporating or sublimating a film forming source material including a metal; a gas material supply unit for supplying the processing chamber with the gas material; and a transport path for transporting the gas material to the gas material supply unit from the gas material generation unit. The film forming apparatus is characterized in that a metal-containing layer is formed on an organic layer including a light emitting layer on the target substrate.
1. A method for manufacturing a light emitting element comprising:
a first film forming step of forming a metal-containing layer on an organic layer, wherein the organic layer is formed on a substrate accommodated in a processing chamber and includes a light emitting layer; and
a second film forming step of forming an electrode on the metal-containing layer,
wherein, in the first film forming step, the metal-containing layer is formed by supplying a gas material and a carrier gas onto the organic layer via a transport path which is connected to the processing chamber,
wherein the gas material is generated by evaporating or sublimating a source material in a space arranged outside the processing chamber, and
wherein, in the second film forming step, the electrode is formed by a sputtering method.
2. The method of claim 1 , wherein the metal-containing layer is an Li layer.
3. The method of claim 1 , wherein the electrode is made of Ag.
4. The method of claim 1 , wherein, in the second film forming step, the electrode is formed while using two targets facing each other.
5. The method of claim 1 , further comprising:
an etching step of etching the organic layer while using the electrode as a mask.
6. The method of claim 1 , wherein, in the first film forming step, the substrate is held in a manner that a film forming surface of the substrate faces upward.
7. The method of claim 1 , wherein, in the first film forming step, the gas material is supplied to a vicinity of the substrate.