Image and light sensor chip packages
An image or light sensor chip package includes an image or light sensor chip having a non-photosensitive area and a photosensitive area surrounded by the non-photosensitive area. In the photosensitive area, there are light sensors, a layer of optical or color filter array over the light sensors and microlenses over the layer of optical or color filter array. In the non-photosensitive area, there are an adhesive polymer layer and multiple metal structures having a portion in the adhesive polymer layer. A transparent substrate is formed on a top surface of the adhesive polymer layer and over the microlenses. The image or light sensor chip package also includes wirebonded wires or a flexible substrate bonded with the metal structures of the image or light sensor chip.
1. A light sensor chip comprising:
a semiconductor substrate;
multiple transistors each including a diffusion or doped area in said semiconductor substrate and a gate over a top surface of said semiconductor substrate;
a first dielectric layer over said top surface of said semiconductor substrate;
an interconnection layer over said first dielectric layer;
a second dielectric layer over said interconnection layer and over said first dielectric layer;
a metal trace over said second dielectric layer, wherein said metal trace has a width smaller than 1 micrometer;
an insulating layer on a first region of said metal trace, over said interconnection layer and over said first and second dielectric layers, wherein an opening in said insulating layer is over a second region of said metal trace, and said second region is at a bottom of said opening;
a polymer layer on said insulating layer;
a metal layer on said second region of said metal trace, wherein said metal layer includes a portion in said polymer layer, wherein said metal layer is connected to said second region of said metal trace through said opening, wherein said metal layer has a thickness between 3 and 100 micrometers and a width between 5 and 100 micrometers; and
a transparent substrate on a top surface of said polymer layer and over said multiple transistors, wherein an air space is between said insulating layer and said transparent substrate and over said multiple transistors, wherein a bottom surface of said transparent substrate provides a top wall of said air space, and said polymer layer provides a sidewall of said air space.
2. The light sensor chip of claim 1 , further comprising a microelectromechanical system in said air space and over said multiple transistors.
3. The light sensor chip of claim 1 , further comprising a layer of filter array and multiple microlenses in said air space and over said multiple transistors.
4. The light sensor chip of claim 1 , wherein said multiple transistors compose a complementary-metal-oxide-semiconductor (CMOS) device or a charge coupled device (CCD).
5. The light sensor chip of claim 1 , wherein said transparent substrate includes a glass substrate.
6. The light sensor chip of claim 1 , wherein said metal layer includes a copper layer or a gold layer.