Transparent nonvolatile memory thin film transistor and method of manufacturing the same
View Patent ↗Provided are a transparent nonvolatile memory thin film transistor (TFT) and a method of manufacturing the same. The memory TFT includes source and drain electrodes disposed on a transparent substrate. A transparent semiconductor thin layer is disposed on the source and drain electrodes and the transparent substrate interposed between the source and drain electrodes. An organic ferroelectric thin layer is disposed on the transparent semiconductor thin layer. A gate electrode is disposed on the organic ferroelectric thin layer in alignment with the transparent semiconductor thin layer. Thus, the transparent nonvolatile memory TFT employs the organic ferroelectric thin layer, the oxide semiconductor thin layer, and auxiliary insulating layers disposed above and below the organic ferroelectric thin layer, thereby enabling low-cost manufacture of a transparent nonvolatile memory device capable of a low-temperature process.
1. A transparent nonvolatile memory thin film transistor (TFT) comprising:
source and drain electrodes disposed over a transparent substrate;
a transparent semiconductor thin layer disposed over the transparent substrate between the source and drain electrodes;
an organic ferroelectric thin layer disposed over the transparent semiconductor thin layer;
a gate electrode disposed over the organic ferroelectric thin layer;
a first auxiliary insulating layer disposed between the transparent semiconductor thin layer and the organic ferroelectric thin layer; and
a second auxiliary insulating layer disposed over the organic ferroelectric thin layer.
2. The memory TFT according to claim 1 , wherein the source and drain electrodes are formed of a transparent conductive oxide.
3. The memory TFT according to claim 1 , wherein the transparent semiconductor thin layer is a transparent oxide semiconductor thin layer.
4. The memory TFT according to claim 3 , wherein the oxide semiconductor thin layer is formed of at least two selected from the group consisting of zinc oxide (ZnO), indium-gallium-zinc oxide (In—Ga—Zn—O), zinc-tin oxide (Zn—Sn—O), and an oxide containing at least two selected from the group consisting of zinc (Zn), indium (In), gallium (Ga), tin (Sn), and aluminum (Al).
5. The memory TFT according to claim 1 , wherein the organic ferroelectric thin layer is formed of a copolymer of poly(vinylidene fluoride-trifluorotethylene) (P(VDF-TrFE)).
6. The memory TFT according to claim 1 , wherein the organic ferroelectric thin layer includes a via hole exposing the source and drain electrodes,
the TFT further comprising a pad disposed over the organic ferroelectric thin layer to fill the via hole.
7. The memory TFT according to claim 1 , wherein the first auxiliary insulating layer or the second auxiliary insulating layer is one selected from the group consisting of a silicon-based insulating layer, a metal oxide layer, and a silicate insulating layer formed of a metal element constituting the metal oxide layer and silicon,
wherein the silicon-based insulating layer is one selected from the group consisting of a silicon oxide (SiO 2 ) layer, a silicon nitride (SiN) layer, and a silicon oxynitride (SiON) layer, and the metal oxide layer is one selected from the group consisting of an aluminum oxide (Al 2 O 3 ) layer, a hafnium oxide (HfO 2 ) layer, a zirconium oxide (ZrO 2 ) layer, a magnesium oxide (MgO) layer, a titanium oxide (TiO 2 ) layer, a tantalum oxide (Ta 2 O 5 ) layer, a lanthanum oxide (La 2 O 3 ) layer, and a strontium-titanium oxide (SrTiO 3 ) layer.