Semiconductor device and method of visual inspection and apparatus for visual inspection
A semiconductor device having the structure, which is adopted for the highly precise visual inspection with a lower cost, is achieved. A semiconductor device is a semiconductor device having a region for forming an electric circuit, and includes seal rings provided in an interconnect layer and surrounding the region for forming an electric circuit, and a dummy metal via provided in the interconnect layer and located outside of the seal rings. In a cross section perpendicular to an elongating direction of the seal ring, the width of the dummy metal via is smaller than the width of the seal ring.
1. A method for inspecting an appearance of a semiconductor device having a region for forming an electric circuit, comprising:
a guard ring, provided in an interconnect layer, and surrounding said region for forming the electric circuit; and
at least one dummy metal via, provided in said interconnect layer and located outside of said guard ring,
wherein a width of said dummy metal via is smaller than a width of said guard ring in a cross section that is perpendicular to a direction of an elongation of said guard ring, and an area between the region for forming the electric circuit and the guard ring is void of the at least one dummy metal via;
the method for inspecting comprising:
identifying an occurrence of a displacement of said dummy metal via.
2. The method for inspecting the appearance of the semiconductor device as set forth in claim 1 , wherein said at least one dummy metal via is provided over an entire peripheral of said region for forming the electric circuit.
3. The method for inspecting the appearance of the semiconductor device as set forth in claim 1 , wherein said at least one dummy metal via is composed of aluminum (Al), copper (Cu) or tungsten (W).
4. The method for inspecting the appearance of the semiconductor device as set forth in claim 1 , wherein said at least one dummy metal via is provided in a section between the guard ring and scribe lines of the semiconductor device.
5. The method for inspecting the appearance of the semiconductor device as set forth in claim 1 , wherein said at least one dummy metal via includes a plurality of dummy metal vias, each formed in a section between the guard ring and scribe lines of the semiconductor device.
6. The method for inspecting the appearance of the semiconductor device as set forth in claim 5 , wherein each of the plurality of dummy metal vias is disposed adjacent to each other.
7. The method for inspecting the appearance of the semiconductor device as set forth in claim 1 , wherein said identification of the occurrence of the displacement of said dummy metal via is carried out by an omnifocal imaging process from above said semiconductor device.