Non-contact process kit

1. A process kit, comprising:

a generally cylindrical shield comprising:

a substantially flat cylindrical body having an upper surface tapering down to an inner end, wherein the body further comprises:

a sloped surface extending downward from the upper surface; and

a second lip extending downward from the sloped surface;

at least one elongated cylindrical ring extending downward from the body; and

a mounting portion extending upwards from the upper surface of the body from an outer wall of the body, the mounting portion having a mounting flange extending radially outward beyond the outer wall of the body, the mounting flange and the outer wall of the body defining a first lip; an inner wall extending from the upper surface of the body, and an inner taper that flares radially outward and upwards from the inner wall.

2. The process kit of claim 1 , wherein the body is fabricated from at least one of stainless steel or titanium.

3. The process kit of claim 1 , wherein the body is fabricated from or coated with a conductive material.

4. The process kit of claim 1 , wherein at least a portion of the body has a surface treatment.

5. The process kit of claim 1 , wherein at least a portion of the body has a bead blasted surface.

6. The process kit of claim 1 , wherein the at least one elongated cylindrical ring has a perpendicular orientation relative to a centerline of the body.

7. The process kit of claim 1 , wherein the at least one elongated cylindrical ring has an orientation of about 5 to about 35 degrees relative to a centerline of the body.

8. The process kit of claim 1 , wherein the at least one elongated cylindrical ring further comprises:

an inner ring; and

an outer ring spaced in a substantially parallel relation to the inner ring.

9. The process kit of claim 1 , wherein the inner end of the body truncates a sloped surface, and wherein the inner end is substantially parallel to a centerline of the body.

10. The process kit of claim 1 further comprising:

a generally cylindrical deposition ring comprising:

a substantially flat cylindrical body having an upper surface and a lower surface, the lower surface configured to be supported on a ledge of a substrate support pedestal;

at least one downwardly extending u-channel coupled to an outer portion of the body;

an inner wall extending upward from the upper surface of an inner region of the body and having a substrate support surface; and

a substrate support ledge extending radially inward from the inner wall.

11. The process kit of claim 10 , wherein the deposition ring further comprises:

a ledge extending radially inward from the inner wall; and

a plurality of buttons disposed on an upper surface of the ledge and defining the substrate support surface.

12. The process kit of claim 11 , wherein the plurality of buttons further comprises:

three buttons equally spaced apart in a polar array.

13. The process kit of claim 10 , wherein the u-channel is configured to interleave with the at least one ring of the shield.

14. The process kit of claim 10 , wherein the u-channel further comprises:

a first leg coupled to the body of the deposition ring;

a second leg spaced outward from the first leg; and

a bottom joining the legs.

15. The process kit of claim 14 , wherein the legs are substantially parallel to a centerline of the deposition ring.

16. The process kit of claim 14 , wherein the legs have an orientation of about 5 to about 35 degrees relative to a centerline of the deposition ring.

17. The process kit of claim 10 , wherein the body of the deposition ring further comprises:

a trap wall extending upwards from the upper surface of the deposition ring; and

a lip extending inward and downward from the trap wall to overhang an inner portion of the upper surface of the deposition ring.

18. The process kit of claim 17 , wherein an upper surface of the trap wall further comprises:

an inner sloped wall meeting an outer sloped wall at an apex.

19. A process kit comprising:

a generally cylindrical deposition ring comprising:

a substantially flat cylindrical body having an upper surface and a lower surface, the lower surface configured to be supported on a ledge of a substrate support pedestal;

at least one downwardly extending u-channel coupled to an outer portion of the body;

an inner wall extending upward from the upper surface of an inner region of the body and having a substrate support surface;

a ledge extending radially inward from the inner wall; and

a plurality of buttons disposed on an upper surface of the ledge and defining the substrate support surface.

20. The process kit of claim 19 , wherein the plurality of buttons further comprises:

three buttons equally spaced apart in a polar array.

21. The process kit of claim 19 , wherein the u-channel is facing upwards.

22. The process kit of claim 19 , wherein the u-channel further comprises:

a first leg coupled to the body of the deposition ring;

a second leg spaced outward from the first leg; and

a bottom joining the legs.

23. The process kit of claim 22 , wherein the legs are substantially parallel to a centerline of the deposition ring.

24. The process kit of claim 22 , wherein the body is fabricated from at least one of stainless steel or titanium.

25. The process kit of claim 19 , wherein the body of the deposition ring further comprises:

a trap wall extending upwards from the upper surface of the deposition ring; and

a lip extending inward and downward from the trap wall to overhang an inner portion of the upper surface of the deposition ring.

26. The process kit of claim 25 , wherein an upper surface of the trap wall further comprises:

an inner sloped wall meeting an outer sloped wall at an apex.