Method for fabricating flexible display device
A method for fabricating flexible display device includes the following steps. Firstly, a rigid substrate is provided. Secondly, a sacrificing layer is formed on the rigid substrate. Thirdly, an element layer is formed on the sacrificing layer. Fourthly, the sacrificing layer is etched by a gas and then gasified, so that the element layer is separated from the rigid substrate. Then, the element layer is adhered to a flexible substrate. Because products generated by the sacrificing layer reacting with the gas are gases, the products can be removed by air exhaust for simplifying process. Thus, the cost of the process of fabricating flexible display device can be decreased.
1. A method for fabricating flexible display device, comprising the steps of:
providing a rigid substrate;
forming a sacrificing layer on the rigid substrate;
forming an element layer directly contacting with and on the sacrificing layer;
forming a temporarily fixing layer directly contacting with and on the element layer;
etching the sacrificing layer by a gas thus the sacrificing layer is gasified for separating element layer from the rigid substrate; and
adhering the element layer to a flexible substrate.
2. The method as claimed in claim 1 , wherein the sacrificing layer is made of molybdenum (Mo), titanium (Ti), tungsten (W) or amorphous silicon.
3. The method as claimed in claim 1 , wherein the gas is xenon fluoride gas.
4. The method as claimed in claim 1 , wherein the method for forming the element layer comprises the steps of:
forming an insulating layer on the sacrificing layer;
forming a thin film transistors array on the insulating layer; and
forming a display medium layer on the thin film transistors array.
5. The method as claimed in claim 4 , wherein the insulating layer is made of oxide or nitride.
6. The method as claimed in claim 4 , wherein the display medium layer comprises microcapsule electrophoretic layer, microcup electrophoretic layer, liquid crystal layer, electro-wetting layer or quick response-liquid powder layer.
7. The method as claimed in claim 1 , further comprising the step of removing the temporarily fixing layer after the element layer being adhered to the flexible substrate.
8. The method as claimed in claim 4 , further comprising the step of assembling a color filter above the flexible substrate so as to make the element layer between the color filter and the flexible substrate.
9. The method as claimed in claim 1 , wherein the method for forming the element layer comprises the steps of:
forming an insulating layer on the sacrificing layer; and
forming a color filter array on the sacrificing layer.
10. The method as claimed in claim 9 , further comprising the step of forming a passivation layer on the color filter array.
11. The method as claimed in claim 9 , further comprising the step of forming a display medium layer on the color filter array.
12. The method as claimed in claim 9 , further comprising the step of assembling the flexible substrate above a thin film transistors array substrate so as to make the element layer between the thin film transistors array substrate and the flexible substrate.
13. The method as claimed in claim 1 , wherein the rigid substrate is made of glass.
14. The method as claimed in claim 1 , wherein the flexible substrate is made of polyimide, polyethylene terephthalate, polyethylene naphthalene, aromatic polyamide, polycycloolefin, polysulfone, epoxy resin, polycarbonate or polymethyl methacrylate.