Radiation-sensitive resin composition and compound
A radiation-sensitive resin composition includes a compound shown by a formula (1) in which R 1 represents a divalent hydrocarbon group having 1 to 20 carbon atoms and R 2 represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms, or R 1 and R 2 form a heterocyclic structure having 4 to 20 carbon atoms, R 3 represents a monovalent acid-dissociable group, n is an integer from 1 to 6, each of R 4A , R 4B , and R 4C represents one of an alkyl group having 1 to 4 carbon atoms and a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, or R 4A represents one of an alkyl group having 1 to 4 carbon atoms and a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms and R 4B and R 4C form a divalent alicyclic hydrocarbon group having 4 to 20 carbon atoms.
1. A radiation-sensitive resin composition comprising:
(A) a compound shown by a formula (1);
(B) a resin protected by an acid-dissociable group and being insoluble or scarcely soluble in alkali, the resin becoming alkali-soluble upon dissociation of the acid-dissociable group; and
(C) a photoacid generator,
wherein
R 1 represents a hydrocarbon group having 1 to 20 carbon atoms and R 2 represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms, or
R 1 and R 2 are such that R 1 and R 2 together with a nitrogen atom form a heterocyclic structure having 4 to 20 carbon atoms if R 1 and R 2 bond with each other via the nitrogen atom,
wherein R 3 represents a monovalent acid-dissociable group, n is an integer from 1 to 6,
wherein
each of R 4A , R 4B , and R 4C represents one of an alkyl group having 1 to 4 carbon atoms and a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, or
R 4A represents one of an alkyl group having 1 to 4 carbon atoms and a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms and R 4B and R 4C are such that R 4B and R 4C together with a carbon atom form a divalent alicyclic hydrocarbon group having 4 to 20 carbon atoms if R 4B and R 4C bond with each other via the carbon atom, and
wherein
R 3 in the formula (1) comprises a group shown by formula (I-1),
wherein
X represents an oxygen atom or a sulfur atom, each of R 5 and R 6 represents one of a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, and an alkoxy group having 1 to 20 carbon atoms, and R 7 represents one of an alkyl group having 1 to 20 carbon atoms, an alkoxyalkyl group having 2 to 20 carbon atoms, an alicyclic hydrocarbon hydrocarbon group having 3 to 20 carbon atoms, an aryl group having 6 to 18 carbon atoms, and an aralkyl group having 7 to 19 carbon atoms.
2. The radiation-sensitive resin composition according to claim 1 , wherein the group represented by —CR 4A R 4B R 4C in the formula (1) comprises one of a tert-butyl group and a tert-amyl group.
3. The radiation-sensitive resin composition according to claim 1 , wherein the resin (B) comprises a repeating unit shown by a formula (2),
wherein R 10 represents a hydrogen atom or a methyl group, and
wherein
each of R 11A , R 11B , and R 11C represents one of a linear or branched alkyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 4 to 20 carbon atoms, or
R 11A represents one of a linear or branched alkyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 4 to 20 carbon atoms and R 11B and R 11C are such that R 11B and R 11C together with a carbon atom form an alicyclic hydrocarbon group having 4 to 20 carbon atoms if R 11B and R 11C bond with each other via the carbon atom.
4. The radiation-sensitive resin composition according to claim 1 , wherein n=1.
5. A compound shown by a formula (1),
wherein
R 1 represents a divalent hydrocarbon group having 1 to 20 carbon atoms and R 2 represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms, or
R 1 and R 2 are such that R 1 and R 2 together with a nitrogen atom form a heterocyclic structure having 4 to 20 carbon atoms if R 1 and R 2 bond with each other via the nitrogen atom,
wherein R 3 represents a monovalent acid-dissociable group, n is an integer from 1 to 6,
wherein
each of R 4A , R 4B , and R 4C represents one of an alkyl group having 1 to 4 carbon atoms and a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, or
R 4A represents one of an alkyl group having 1 to 4 carbon atoms and a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms and R 4B and R 4C are such that R 4B and R 4C together with a carbon atom form a divalent alicyclic hydrocarbon group having 4 to 20 carbon atoms if R 4B and R 4C bond with each other via the carbon atom, and
wherein
R 3 in the formula (1) comprises a group shown by formula (I-1),
wherein
X represents an oxygen atom or a sulfur atom, each of R 5 and R 6 represents one of a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, and an alkoxy group having 1 to 20 carbon atoms, and R 7 represents one of an alkyl group having 1 to 20 carbon atoms, an alkoxyalkyl group having 2 to 20 carbon atoms, an alicyclic hydrocarbon hydrocarbon group having 3 to 20 carbon atoms, an aryl group having 6 to 18 carbon atoms, and an aralkyl group having 7 to 19 carbon atoms.
6. The compound according to claim 5 , wherein n=1.
7. A radiation-sensitive resin composition comprising:
(A) a compound shown by a formula (1);
(B) a resin protected by an acid-dissociable group and being insoluble or scarcely soluble in alkali, the resin becoming alkali-soluble upon dissociation of the acid-dissociable group; and
(C) a photoacid generator,
wherein
R 1 represents a hydrocarbon group having 1 to 20 carbon atoms and R 2 represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms, or
R 1 and R 2 are such that R 1 and R 2 together with a nitrogen atom form a heterocyclic structure having 4 to 20 carbon atoms if R 1 and R 2 bond with each other via the nitrogen atom,
wherein R 3 represents a monovalent acid-dissociable group, n is an integer from 1 to 6,
wherein
each of R 4A , R 4B , and R 4C represents one of an alkyl group having 1 to 4 carbon atoms and a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, or
R 4A represents one of an alkyl group having 1 to 4 carbon atoms and a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms and R 4B and R 4C are such that R 4B and R 4C together with a carbon atom form a divalent alicyclic hydrocarbon group having 4 to 20 carbon atoms if R 4B and R 4C bond with each other via the carbon atom,
wherein
R 3 in the formula (1) comprises a group shown by formula (I-1),
wherein
X represents an oxygen atom or a sulfur atom, each of R 5 and R 6 represents one of a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, and an alkoxy group having 1 to 20 carbon atoms, and R 7 represents one of an alkyl group having 1 to 20 carbon atoms, an alkoxyalkyl group having 2 to 20 carbon atoms, an alicyclic hydrocarbon hydrocarbon group having 3 to 20 carbon atoms, an aryl group having 6 to 18 carbon atoms, and an aralkyl group having 7 to 19 carbon atoms, and
wherein
R 5 and R 7 bond to form a heterocyclic structure having 3 to 20 carbon atoms together with the carbon atom that is bonded to R 5 and R 7 .
8. The radiation-sensitive resin composition according to claim 7 , wherein the group represented by —CR 4A R 4B R 4C in the formula (1) comprises one of a tert-butyl group and a tert-amyl group.
9. The radiation-sensitive resin composition according to claim 7 , wherein the resin (B) comprises a repeating unit shown by a formula (2),
wherein R 10 represents a hydrogen atom or a methyl group, and
wherein
each of R 11A , R 11B , and R 11C represents one of a linear or branched alkyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 4 to 20 carbon atoms, or
R 11A represents one of a linear or branched alkyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 4 to 20 carbon atoms and R 11B and R 11C are such that R 11B and R 11c together with a carbon atom form an alicyclic hydrocarbon group having 4 to 20 carbon atoms if R 11B and R 11C bond with each other via the carbon atom.
10. The radiation-sensitive resin composition according to claim 7 , wherein n=1.