IP Library Granted Patent US 8,304,967
Granted Patent B2
US 8,304,967 · App. 12/816,530 · Granted Nov 6, 2012

Flexural vibration piece, flexural vibrator, and electronic apparatus

Assignee: Seiko Epson Corporation
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Quick Facts
Patent No.
US 8,304,967
App. No.
12/816,530
Granted
Nov 6, 2012
Kind
B2
Abstract

A flexural vibration piece includes: a base portion; a vibrating arm extending from the base portion and having a first surface, a second surface opposing the first surface, and side surfaces connecting the first surface and second surface, wherein a laminated structure including a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and second electrode, is formed on each of the first surface and second surface, the piezoelectric layer formed on the first surface side and the piezoelectric layer formed on the second surface side have mutually opposite polarization directions, and the first electrode formed on the first surface side and the first electrode formed on the second surface side are connected to each other.

Claims (22)

1. A flexural vibration piece comprising:

a base portion;

first and second vibrating arms extending from the base portion, each of the first and second vibrating arms having a first surface, a second surface opposing the first surface, and side surfaces connecting the first surface and the second surface, wherein

the first vibrating arm has a first laminated structure including a first electrode, a second electrode, and a first piezoelectric layer disposed between the first electrode and the second electrode, the first laminated structure is formed on each of the first surface and the second surface, and the first electrode is disposed between the first surface and the first piezoelectric layer and between the second surface and the first piezoelectric layer,

the first piezoelectric layer formed on the first surface side and the first piezoelectric layer formed on the second surface side have mutually opposite polarization directions,

the first electrode formed on the first surface side and the first electrode formed on the second surface side are connected to each other,

the second vibrating arm has a second laminated structure including a third electrode, a fourth electrode, and a second piezoelectric layer disposed between the third electrode and the fourth electrode, the second laminated structure is formed on each of the first surface and the second surface, and the third electrode is disposed between the first surface and the second piezoelectric layer and between the second surface and the second piezoelectric layer,

the second piezoelectric layer formed on the first surface side and the second piezoelectric layer formed on the second surface side have mutually opposite polarization directions,

the third electrode formed on the first surface side and the third electrode formed on the second surface side are connected to each other,

the second electrode formed on the first surface side of the first vibrating arm and the fourth electrode formed on the second surface side of the second vibrating arm are connected to each other,

the second electrode formed on the second surface side of the first vibrating arm and the fourth electrode formed on the first surface side of the second vibrating arm are connected to each other, and

a first voltage applied to the second electrode formed on the first surface side of the first vibrating arm is different from a second voltage applied to the second electrode formed on the second surface side of the first vibrating arm.

2. The flexural vibration piece according to claim 1 , wherein

when a third voltage is applied between the second electrode formed on the first surface side and the second electrode formed on the second surface side, the polarization direction and an electrical field direction in the first piezoelectric layer formed on one of the first surface side and second surface side are the same as each other, and the polarization direction and electrical field direction in the first piezoelectric layer formed on the other surface side are mutually opposite.

3. The flexural vibration piece according to claim 1 , wherein

the first and second piezoelectric layers are formed on the first surface, the second surface, and the side surfaces of each of the first and second vibrating arms.

4. The flexural vibration piece according to claim 1 , wherein

the first electrode formed on the first surface side and the first electrode formed on the second surface side are electrically floating.

5. The flexural vibration piece according to claim claim 1 , wherein

adjacent the first and second vibrating arms flexurally vibrate in mutually opposite directions.

6. A flexural vibrator which houses the flexural vibration piece according to claim 1 in a package.

7. An electronic apparatus comprising the flexural vibration piece according to claim 1 .

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 16, 2010
From: TAKIZAWA, TERUO
To: SEIKO EPSON CORPORATION
Reel/Frame 024543/0569 →
Priority Claims (1)
JP 2009-143984 · Jun 17, 2009 · national
Continuity (1)
Related Publication 20100320875A1 · Dec 23, 2010