Method for forming buried word line in semiconductor device
Provided is a method for forming a buried word line in a semiconductor device. The method includes forming a trench by etching a pad layer and a substrate, forming a conductive layer to fill the trench, planarizing the conductive layer until the pad layer is exposed, performing an etch-back process on the planarized conductive layer, and performing an annealing process in an atmosphere of a nitride-based gas after at least one of the forming of the conductive layer, the planarizing of the conductive layer, and the performing of the etch-back process on the planarized conductive layer.
1. A method for forming a buried word line in a semiconductor device, comprising:
forming a trench by etching a pad layer and a substrate;
forming a conductive layer to fill the trench;
planarizing the conductive layer until the pad layer is exposed;
performing an etch-back process on the planarized conductive layer; and
performing an annealing process in an atmosphere of a nitride-based gas after the forming of the conductive layer, after the planarizing of the conductive layer, and after the performing of the etch-back process on the planarized conductive layer.
2. The method of claim 1 , wherein in the performing of the annealing process, the nitride gas comprises a NH 3 gas.
3. The method of claim 2 , wherein in the performing of the annealing process, the annealing process is performed in an inert gas mixed with the NH 3 gas.
4. The method of claim 3 , wherein the inert gas comprises one of Ar, He, and N 2 .
5. The method of claim 1 , wherein in the performing of the annealing process, the annealing process is a rapid thermal process (RTP) or a furnace type process.
6. The method of claim 1 , wherein in the performing of the annealing process, the annealing process is performed in a temperature range of about 300°C. to 1100 °C. at a process pressure range of about 0.001 torr to 1000 torr for a duration of about 1 second to 10000 seconds.
7. The method of claim 1 , wherein the conductive layer is a single layer of a titanium nitride layer or a bi-layer of a titanium nitride layer and a tungsten layer.