Resonator element and resonator
A resonator element includes: three or more resonating arms, each of the resonating arms including; a lower electrode provided on a first surface of the resonating arm, a piezoelectric film formed on the lower electrode, an upper electrode formed on the piezoelectric film, a first wiring line coupled to the lower electrode, and a second wiring line coupled to the upper electrode; and a base to which the resonating arms are connected. In the resonator element, the resonating arm vibrates in a thickness direction of the resonating arm. The resonating arms adjacent to each other vibrate in opposite directions from each other. The first surface is opposed to a second surface in the thickness direction. The second wiring line is drawn out to the second surface through side surfaces of the resonating arm so as to surround the resonating arm.
1. A resonator element, comprising:
three or more resonating arms, each of the resonating arms including:
a lower electrode provided above a first surface of the resonating arm;
a piezoelectric film formed above an upper side of the lower electrode;
an upper electrode formed above an upper side of the piezoelectric film;
a first wiring line coupled to the lower electrode; and
a second wiring line coupled to the upper electrode; and
a base to which the resonating arms are connected,
wherein the resonating arm vibrates in a thickness direction of the resonating arm,
wherein the resonating arms adjacent to each other vibrate in opposite directions from each other,
wherein the first surface is opposed to a second surface in the thickness direction, and
wherein the second wiring line is drawn out to the second surface through side surfaces of the resonating arm so as to surround the resonating arm with the second wiring line.
2. The resonator element according to claim 1 , wherein a mounting electrode coupled to the first and second wiring lines is formed at an end of the base.
3. The resonator element according to claim 2 , wherein the base is formed thicker than the resonating arm, and a portion of the base at which the resonating arm is connected to the base is formed such that a thickness of the portion continuously increases from the resonating arm toward the base.
4. A resonator element, comprising:
three or more resonating arms, each of the resonating arms including:
a lower electrode provided above a first surface of the resonating arm;
a piezoelectric film formed above the lower electrode;
an upper electrode formed above the piezoelectric film;
a first wiring line coupled to the lower electrode; and
a second wiring line coupled to the upper electrode; and
a base to which the resonating arms are connected,
wherein the resonating arm vibrates in a thickness direction of the resonating arm,
wherein the resonating arms adjacent to each other vibrate in opposite directions from each other,
wherein the first surface is opposed to a second surface in the thickness direction, and
wherein the first wiring line is drawn out to the second surface through side surfaces of the resonating arm so as to surround the resonating arm.
5. The resonator element according to claim 4 , wherein a mounting electrode coupled to the first and second wiring lines is formed at an end of the base.
6. The resonator element according to claim 5 , wherein the base is formed thicker than the resonating arm, and a portion of the base at which the resonating arm is connected to the base is formed such that a thickness of the portion continuously increases from the resonating arm toward the base.
7. A resonator, comprising:
the resonator element according to claim 1 ; and
a container housing the resonator,
wherein the resonator element is hermetically housed in the container.