Polishing liquid
A polishing liquid for a chemical mechanical polishing of a semiconductor device includes (a) a carboxylic acid compound having one or more carboxy groups, (b) colloidal silica particles having a ζ potential of −10 mV to −35 mV when used in the polishing liquid, (c) a benzotriazole derivative, (d) an anionic surfactant, and (e) an oxidizing agent, and the polishing liquid has a pH of from 5.0 to 8.0.
1. A polishing liquid for a chemical mechanical polishing of a semiconductor device, the polishing liquid comprising:
(a) a carboxylic acid compound having one or more carboxy groups,
(b) colloidal silica particles having a ζ potential of −12 mV to −26 mV when used in the polishing liquid,
(c) a benzotriazole derivative,
(d) an anionic surfactant, and
(e) an oxidizing agent,
the polishing liquid having a pH of from 5.0 to 8.0.
2. The polishing liquid according to claim 1 , wherein the concentration of (a) the carboxylic acid compound is in the range of from 0.5% by mass to 8% by mass.
3. The polishing liquid according to claim 1 , wherein (a) the carboxylic acid compound is at least one selected from the group consisting of acetic acid, glycolic acid, lactic acid, salicylic acid, iminodiacetate, nitrilotriacetic acid, ethylenediaminetetraacetic acid, diethylenetriamine pentaacetic acid, oxalic acid, malonic acid, succinic acid, malic acid, tartaric acid, citric acid, adipic acid and phthalic acid.
4. The polishing liquid according claim 1 , wherein the concentration of (b) the colloidal silica particles is in the range of from 0.5% by mass to 5% by mass with respect to the total amount of the polishing liquid.
5. The polishing liquid according to claim 1 , wherein the primary average particle diameter of (b) the colloidal silica particles is in the range of from 10 nm to 100 nm.
6. The polishing liquid according to claim 1 , wherein (c) the benzotriazole derivative is at least one selected from the group consisting of 1,2,3-benzotriazole, 5-methyl-1,2,3-benzotriazole, 5,6-dimethyl-1,2,3-benzotriazole, 5-carboxy-1,2,3-benzotriazole, and 5,6-dicarboxy-1,2,3-benzotriazole.
7. The polishing liquid according to claim 1 , wherein (d) the anionic surfactant comprises —COO— or —SO 2 —O—.
8. The polishing liquid according to claim 1 , further comprising a polysaccharide.
9. The polishing liquid according to claim 8 , wherein the polysaccharide is at least one selected from the group consisting of pullulan, cellulose, agarose, pectin, starch, and derivatives thereof.
10. A chemical mechanical polishing method of polishing a surface of a semiconductor device, comprising: polishing the surface of the semiconductor device by relative movement of a polishing pad and the surface of the semiconductor device while supplying a polishing liquid to the polishing pad, the polishing liquid comprising: (a) a carboxylic acid compound having one or more carboxy groups, (b) colloidal silica particles having a ζ potential of −12 mV to −26 mV when used in the polishing liquid, (c) a benzotriazole derivative, (d) an anionic surfactant, and (e) an oxidizing agent, the polishing liquid having a pH of from 5.0 to 8.0.
11. The chemical mechanical polishing method according to claim 10 , wherein (a) the carboxylic acid compound is at least one selected from the group consisting of acetic acid, glycolic acid, lactic acid, salicylic acid, iminodiacetate, nitrilotriacetic acid, ethylenediaminetetraacetic acid, diethylenetriamine pentaacetic acid, oxalic acid, malonic acid, succinic acid, malic acid, tartaric acid, citric acid, adipic acid and phthalic acid.
12. A polishing liquid for a chemical mechanical polishing of a semiconductor device, the polishing liquid comprising:
(a) a carboxylic acid compound having one or more carboxy groups,
(b) colloidal silica particles containing no impurity and having a ζ potential of −12 mV to −26 mV when used in the polishing liquid,
(c) a benzotriazole derivative,
(d) an anionic surfactant, and
(e) an oxidizing agent,
the polishing liquid having a pH of from 5.0 to 8.0.
13. The polishing liquid according to claim 12 , wherein (a) the carboxylic acid compound is at least one selected from the group consisting of acetic acid, glycolic acid, lactic acid, salicylic acid, iminodiacetate, nitrilotriacetic acid, ethylenediaminetetraacetic acid, diethylenetriamine pentaacetic acid, oxalic acid, malonic acid, succinic acid, malic acid, tartaric acid, citric acid, adipic acid and phthalic acid.
14. The polishing liquid according to claim 12 , wherein (c) the benzotriazole derivative is at least one selected from the group consisting of 1,2,3-benzotriazole, 5-methyl-1,2,3-benzotriazole, 5,6-dimethyl-1,2,3-benzotriazole, 5-carboxy-1,2,3-benzotriazole, and 5,6-dicarboxy-1,2,3-benzotriazole.
15. The polishing liquid according to claim 12 , wherein (d) the anionic surfactant comprises —COO— or —SO 2 —O—.
16. The polishing liquid according to claim 12 , further comprising a polysaccharide.