Sheet structure, semiconductor device and method of growing carbon structure
The sheet structure includes a plurality of linear structure bundles including a plurality of linear structures of carbon atoms arranged at a first gap, and arranged at a second gap larger than the first gap, a graphite layer formed in a region between the plurality of linear structure bundles and connected to the plurality of linear structure bundles, and a filling layer filled in the first gap and the second gap and retaining the plurality of linear structure bundles and the graphite layer.
1. A sheet structure comprising:
a plurality of linear structure bundles including a plurality of linear structures of carbon atoms arranged at a first gap, and arranged at a second gap larger than the first gap;
a graphite layer formed in a region between the plurality of linear structure bundles and connected to the plurality of linear structure bundles; and
a filling layer filled in the first gap and the second gap and retaining the plurality of linear structure bundles and the graphite layer.
2. The sheet structure according to claim 1 , further comprising:
a linear structure layer formed in the region between the plurality of linear structure bundles, including a plurality of linear structures of carbon atoms, and having one ends of the plurality of linear structures connected to the graphite layer.
3. The sheet structure according to claim 2 , further comprising:
a plurality of the linear structure layers and a plurality of the graphite layers, wherein
the linear structure layers and the graphite layers are alternately stacked.
4. The sheet structure according to claim 1 , wherein
the plurality of linear structures forming the plurality of linear structure bundles are respectively oriented in a direction of a film thickness of the filling layer.
5. The sheet structure according to claim 1 , wherein
the graphite layer has a layer structure parallel to a surface of the filling layer.
6. The sheet structure according to claim 1 , wherein
both ends of said a plurality of linear structure bundles are exposed on surfaces.
7. The sheet structure according to claim 1 , wherein
one surface of the graphite layer is exposed on a surface.