Opto-electric hybrid module and method of manufacturing the same
An opto-electric hybrid module capable of shortening the distance between a light-emitting section or a light-receiving section of a semiconductor chip and a reflecting surface formed in a core to reduce optical losses between an opto-electric conversion substrate section and an optical waveguide section, and a method of manufacturing the same. A recessed portion ( 3 a ) is formed in a surface of an over cladding layer ( 3 ) of the optical waveguide section (W 1 ). At least part of the light-emitting section ( 7 a ) or the light-receiving section of the semiconductor chip ( 7 ) for opto-electric conversion and at least part of a loop portion ( 8 a ) of a bonding wire ( 8 ) in the opto-electric conversion substrate section (E 1 ) are positioned within the recessed portion ( 3 a ). This brings the light-emitting section ( 7 a ) or the light-receiving section of the semiconductor chip ( 7 ) and the reflecting surface ( 2 a ) formed in the core ( 2 ) closer to each other.
1. An opto-electric hybrid module comprising:
an optical waveguide section including a core for transmitting a light beam, and a first cladding layer and a second cladding layer sandwiching the core therebetween; and
an opto-electric conversion substrate section including a semiconductor chip for opto-electric conversion having one of a light-emitting section and a light-receiving section, an electrode, and a bonding wire electrically connecting the semiconductor chip and the electrode to each other and having a loop portion,
the core having a portion provided in the form of a reflecting surface for reflecting a light beam to allow light transmission between the core and the semiconductor chip,
the first cladding layer of the optical waveguide section having a recessed portion formed in an opposite surface thereof from the core,
at least part of the one of the light-emitting section and the light-receiving section of the semiconductor chip of the opto-electric conversion substrate section being positioned within the recessed portion,
at least part of the loop portion of the bonding wire of the opto-electric conversion substrate section being positioned within the recessed portion,
the opto-electric conversion substrate section and the optical waveguide section being integrated together.
2. The opto-electric hybrid module according to claim 1 ,
wherein the bonding wire, the semiconductor chip and the electrode are not sealed with resin.
3. A method of manufacturing an opto-electric hybrid module, comprising the steps of:
(a) preparing an opto-electric conversion substrate section including a semiconductor chip for opto-electric conversion, an electrode, and a bonding wire electrically connecting the semiconductor chip and the electrode to each other;
(b) producing an optical waveguide section; and
(c) fixing the opto-electric conversion substrate section to the optical waveguide section,
said step (b) including the substeps of
(b-1) forming a first cladding layer, a core for transmitting a light beam, and a second cladding layer so that the first and second cladding layers sandwich the core therebetween,
(b-2) forming a recessed portion in an opposite surface of the first cladding layer from the core, and
(b-3) forming a reflecting surface in a portion of the core, the reflecting surface reflecting a light beam to allow light transmission between the core and the semiconductor chip,
said step (c) including the substeps of
(c-1) positioning at least part of one of a light-emitting section and a light-receiving section of the semiconductor chip of the opto-electric conversion substrate section within the recessed portion, and positioning at least part of a loop portion of the bonding wire of the opto-electric conversion substrate section within the recessed portion, and
(c-2) integrating the opto-electric conversion substrate section and the optical waveguide section together after the step (c-1).
4. The method according to claim 3 ,
wherein the recessed portion in the first cladding layer is formed either by laser cutting after the formation of the first cladding layer or by die-molding at the same time as the formation of the first cladding layer.
5. The method according to claim 3 ,
wherein the bonding wire, the semiconductor chip and the electrode are not sealed with resin.
6. The method according to claim 4 ,
wherein the bonding wire, the semiconductor chip and the electrode are not sealed with resin.