Deposition of phosphor on die top using dry film photoresist
A method for depositing a layer of phosphor-containing material on a plurality of LED dies includes disposing a template with a plurality of openings on an adhesive tape and disposing each of a plurality of LED dies in one of the plurality of openings of the template. The method also includes forming a patterned dry film photoresist layer over the template and the plurality of LED dies. The photoresist layer has a plurality of openings configured to expose a top surface of each of the LED dies. Next, a phosphor-containing material is disposed on the exposed top surface of each the LED dies. The method further includes removing the photoresist layer and the template.
1. A method for depositing a layer of phosphor-containing material on a plurality of LED (light-emitting diode) dies, the method comprising:
disposing a template with a plurality of openings on an adhesive tape;
disposing each of a plurality of LED dies in one of the plurality of openings of the template;
forming a patterned photoresist layer over the template and the plurality of LED dies, the photoresist layer having a plurality of openings configured to expose a top surface of each of the LED dies;
depositing a phosphor-containing material on the exposed top surface of each the LED dies;
removing the photoresist layer; and
removing the template.
2. The method of claim 1 , wherein the adhesive tape is placed on a glass plate.
3. The method of claim 1 , wherein the adhesive tape is a heat release tape.
4. The method of claim 1 , wherein the adhesive tape is a UV release tape.
5. The method of claim 1 , wherein an area of the openings in the template is approximately equal to the size of the LED dies.
6. The method of claim 1 , wherein a thickness of the openings in the template is substantially equal to a thickness of the LED dies.
7. The method of claim 1 , wherein the photoresist layer is configured to cover bond pad areas on the LED dies.
8. The method of claim 1 , wherein depositing the phosphor-containing material in each of the openings in the stencil comprises:
depositing the phosphor-containing material on the photoresist layer and the LED dies; and
removing the phosphor-containing material from the top surface of the photoresist layer and on the top surface of the LED dies that protrudes above the top surface of the stencil.
9. The method of claim 1 , wherein a depth of the openings in the photoresist layer is equal to a desired thickness of the phosphor-containing material.
10. The method of claim 1 , wherein forming the photoresist layer comprising:
disposing a layer of dry photoresist film over the template;
disposing a mask layer over the photoresist layer; and
forming a plurality of openings in the photoresist layer.