High-pressure-resistant hermetic seal terminal and method of manufacturing the same
A high-pressure-resistant hermetic seal terminal includes an eyelet which has a through hole and a lead which is electrically insulated and hermetically sealed via a glass material in the through hole. The glass material is welded in a manner to extend on a lower surface of the eyelet from an end of the through hole to surroundings of the end of the through hole. Preferably, the eyelet has a counterbore, in the lower surface, extending in a region around and surrounding the through hole, and the glass material is welded to the inside of the counterbore.
1. A high-pressure-resistant hermetic seal terminal, comprising:
an eyelet having a through hole and having a counterbore around said through hole in a lower surface of said eyelet; and
a lead electrically insulated and hermetically sealed via a glass material in said through hole,
said glass material including: a portion filling said through hole; an extension portion extending in and welded to an inside of said counterbore; and a glass fillet portion formed below said extension portion, along said lead and in a tapered shape getting gradually narrower, and
said glass fillet portion having a diameter smaller than a diameter of said extension portion.
2. The high-pressure-resistant hermetic seal terminal according to claim 1 , wherein said glass material welded to the inside of said counterbore has a thickness of 0.4 millimeter to 2 millimeters.
3. The high-pressure-resistant hermetic seal terminal according to claim 1 , wherein said counterbore has a depth of not less than 0.4 millimeter and has an inner diameter not less than 1.2 times an inner diameter of said through hole.
4. The high-pressure-resistant hermetic seal terminal according to claim 1 , wherein said glass material welded to the inside of said counterbore has a flat surface.
5. A method of manufacturing a high-pressure-resistant hermetic seal terminal, comprising:
a clearance forming step of providing, opposite to a sealing jig, an eyelet having a through hole and a counterbore formed in a lower surface and extending in a region around and surrounding said through hole to form a clearance between said counterbore and said sealing jig, wherein said sealing jig has a tapered depression in a through hole opening; and
a filling step of filling said through hole, said clearance in said counterbore and said tapered depression with a molten glass material to form an extension portion of said glass material in said counterbore and to form a tapered fillet portion of said glass material in said tapered depression, and with a lead inserted through said through hole and through said through hole opening.
6. The method of manufacturing a high-pressure-resistant hermetic seal terminal according to claim 5 , wherein, in said filling step, said clearance is filled with said glass material using capillary action.
7. The method of manufacturing a high-pressure-resistant hermetic seal terminal according to claim 5 , wherein said sealing jig has a flat surface opposite to said eyelet, and in said filling step, a contact surface of said glass material with said sealing jig is molded flat.