Graphene nanoelectric device fabrication
Embodiments of the present invention provide methods for fabricating graphene nanoelectronic devices with semiconductor compatible processes, which allow wafer scale fabrication of graphene nanoelectronic devices. Embodiments of the present invention also provide methods for passivating graphene nanoelectronic devices, which enable stacking of multiple graphene devices and the creation of high density graphene based circuits. Other embodiments provide methods for producing devices with graphene layer segments having multiple thicknesses.
1. A method of manufacturing a solid state electronic nanostructure including at least one graphene layer segment, comprising the steps of:
depositing or forming the graphene layer segment on a support;
depositing a protective sacrificial layer over the graphene layer segment;
depositing an electrically insulating layer over the protective sacrificial layer;
etching one or more openings in the electrically insulating layer;
removing the protective sacrificial layer to form a cavity between the graphene layer segment and the electrically insulating layer, thereby passivating the graphene layer segment;
depositing an electrically conductive material into the one or more openings in the electrically insulating layer to form one or more electrical contacts with the graphene layer segment; and
depositing or forming one or more additional solid state electronic nanocomponents on or above the electrically insulating layer in electrical contact with the graphene layer segment through said electrical contacts.
2. The method of claim 1 , wherein the sacrificial protective layer is silicon or germanium.
3. The method of claim 1 , further comprising the step of patterning the graphene layer segment using the protective sacrificial layer as a hard mask.