Micro-electromechanical systems (MEMS) structure
A MEMS structure includes a substrate, a structural dielectric layer, and a diaphragm. A structural dielectric layer is disposed over the substrate. The diaphragm is held by the structural dielectric layer at a peripheral end. The diaphragm includes multiple trench/ridge rings at a peripheral region surrounding a central region of the diaphragm. A corrugated structure is located at the central region of the diaphragm, surrounded by the trench/indent rings.
1. A micro-electromechanical systems (MEMS) structure, comprising:
a substrate, having a front side and a back side, wherein the substrate have a predeteimined region;
a structural dielectric layer, disposed over the front side of the substrate;
a diaphragm, held by the structural dielectric layer at a peripheral end, wherein the diaphragm is above the substrate corresponding to the predeteimined region and forms a chamber between the substrate and the diaphragm, the chamber is connected to an outer space by multiple through holes in the substrate or in a structure layer on the front side of the substrate, or in both the substrate and the structure layer,
wherein the diaphragm comprises:
a plurality of trench/ridge rings at a peripheral region surrounding a central region of the diaphragm; and
a corrugated structure, located at the central region of the diaphragm, surrounded by the trench/ridge rings.
2. The MEMS structure of claim 1 , wherein the trench/ridge rings are discontinuous, each of the trench/ridge rings being discontinuous is formed by a plurality of trench/ridge segments.
3. The MEMS structure of claim 2 , wherein multiple gaps between the trench/ridge segments in each of the trench/ridge rings are blocked by the trench/ridge segments of at least another one of the discontinuous trenches in a radiant direction from a center.
4. The MEMS structure of claim 3 , wherein the corrugated structure of the diaphragm comprises a plurality of indent/protruding units, arranged in a honey-comb-like geometric structure.
5. The MEMS structure of claim 4 , wherein each of the indent/protruding units comprises an enclosed ring of trench/ridge to surround an inner region.
6. The MEMS structure of claim 5 , wherein the enclosed ring of trench/ridge in geometric shape is polygon, circular or hexagonal.
7. The MEMS structure of claim 4 , wherein each of the indent/protruding units comprises an enclosed ring of trench/ridge to surround an inner region and a center trench/ridge within the inner region.
8. The MEMS structure of claim 7 , wherein the enclosed ring of trench/ridge in geometric shape is polygon, circular or hexagonal.
9. The MEMS structure of claim 2 , wherein multiple gaps between the trench/ridge segments in each of the trench/ridge rings are aligned to form a radiant gap line.
10. The MEMS structure of claim 9 , wherein the corrugated structure of the diaphragm comprises a plurality of indent/protruding units, arranged in a honey-comb-like geometric structure.
11. The MEMS structure of claim 10 , wherein each of the indent/protruding units comprises an enclosed trench/ridge to surround an inner region.
12. The MEMS structure of claim 11 , wherein the enclosed trench/ridge in geometric shape is polygon, circular or hexagonal.
13. The MEMS structure of claim 10 , wherein each of the indent/protruding units comprises an enclosed trench/ridge to surround an inner region and a center trench/ridge in the inner region.
14. The MEMS structure of claim 13 , wherein the enclosed trench/ridge in geometric shape is polygon, circular or hexagonal.
15. The MEMS structure of claim 1 , wherein the trench/ridge rings include at least one being discontinuous and formed by a plurality of trench/ridge segments and at least one continuous ring.
16. The MEMS structure of claim 1 , wherein the diaphragm is a single layer formed by a single material.
17. The MEMS structure of claim 1 , wherein the diaphragm is a stacked layer.
18. The MEMS structure of claim 1 , wherein the diaphragm has a stacked portion just at the trench/ridge rings.
19. The MEMS structure of claim 1 , wherein the corrugated structure of the diaphragm comprises a plurality of indent/protruding units, arranged in a honey-comb-like geometric structure.
20. A micro-electromechanical systems (MEMS) structure, comprising:
a substrate, having a front side and a back side, wherein the substrate have a predetermined region;
a structural dielectric layer, disposed over the front side of the substrate;
a diaphragm, held by the structural dielectric layer at a peripheral end, wherein the diaphragm is above the substrate corresponding to the predetermined region and forms a chamber between the substrate and the diaphragm, the chamber is connected to an outer space by multiple through venting holes in the substrate or in a structure layer on the front side of the substrate, or in both the substrate and the structure layer,
wherein the diaphragm comprises a plurality of trench/ridge rings at a peripheral region surrounding a central region of the diaphragm, and each of the trench/ridge rings is discontinuous and formed by a plurality of trench/ridge segments.