Semiconductor device and manufacturing method thereof
Stable contact hole forming is attained even when an aluminum oxide film is present between layers provided with contact holes. The process comprises the steps of forming a first element layer on a semiconductor substrate; forming a first interlayer insulating film on the first element layer; forming a second element layer on the first interlayer insulating film; forming a second interlayer insulating film on the second element layer; forming a hole resist pattern on the second interlayer insulating film; conducting a first etching for forming of holes by etching the second interlayer insulating film; and conducting a second etching for extending of holes to the first element layer by etching the first interlayer insulating film.
1. A manufacturing method of a semiconductor device, comprising:
forming a first inter-layer insulating film above a semiconductor substrate;
forming a ferroelectric capacitor layer above the first inter-layer insulating film;
forming a first insulating film above the ferroelectric capacitor layer;
forming a second inter-layer insulating film above the first insulating film;
forming a resist pattern of a hole above the second inter-layer insulating film;
etching the second inter-layer insulating film with the first insulating film as an etch stopper;
etching the first insulating film; and
etching the first inter-layer insulating film to form the hole through the second inter-layer insulating film and the first insulating film and the first inter-layer insulating film.
2. The manufacturing method of a semiconductor device according to claim 1 , wherein the first insulating film includes an aluminum oxide.
3. The manufacturing method of a semiconductor device according to claim 2 , wherein the first inter-layer insulating film includes a silicon oxide.
4. The manufacturing method of a semiconductor device according to claim 2 , wherein the first inter-layer insulating film includes a second insulating film and a third insulating film containing a component different from the second insulating film.
5. The manufacturing method of a semiconductor device according to claim 4 , wherein the second insulating film includes a silicon oxide, and the third insulating film includes a silicon oxynitride.
6. The manufacturing method of a semiconductor device according to claim 4 , wherein the second insulating film includes a silicon oxide, and the third insulating film includes a silicon nitride.