Microelectromechanical systems (MEMS) resonators and related apparatus and methods
Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator, may then be formed from the piezoelectric material wafer.
1. A packaged micromechanical resonator, comprising:
a substrate;
a cap lacking integrated circuitry;
a first portion of an electrically conductive material between the substrate and the cap, disposed such that the substrate, the cap, and the first portion of the electrically conductive material define a sealed, enclosed volume;
a micromechanical resonator comprising a piezoelectric material disposed within the enclosed volume; and
a second portion of the electrically conductive material between the substrate and the cap and configured to conduct a signal between the micromechanical resonator and the cap.
2. The packaged micromechanical resonator of claim 1 , wherein the micromechanical resonator is configured to support Lamb waves.
3. The packaged micromechanical resonator of claim 1 , wherein micromechanical resonator comprises a piezoelectric material.
4. The packaged micromechanical resonator of claim 1 , wherein the cap includes one or more thru vias formed therein.
5. The packaged micromechanical resonator of claim 1 , wherein the cap is formed of an insulating material.
6. The packaged micromechanical resonator of claim 1 , wherein the first portion of the electrically conductive material and the second portion of the electrically conductive material are arranged in a side-by-side configuration.
7. The packaged micromechanical resonator of claim 1 , wherein the first portion of the electrically conductive material and the second portion of the electrically conductive material are disposed within a same plane.
8. The packaged micromechanical resonator of claim 1 , wherein the first portion of the electrically conductive material forms a substantially closed contour, and wherein the second portion of the electrically conductive material is disposed within the substantially closed contour.
9. The packaged micromechanical resonator of claim 8 , wherein the second portion of the electrically conductive material does not form a closed contour.
10. The packaged micromechanical resonator of claim 8 , wherein the second portion of the electrically conductive material comprises a pillar contacting the substrate and the cap.
11. The packaged micromechanical resonator of claim 1 , wherein the first portion of the electrically conductive material contacts both the substrate and the cap.
12. The packaged micromechanical resonator of claim 11 , wherein the second portion of the electrically conductive material contacts both the substrate and the cap.
13. The packaged micromechanical resonator of claim 1 , wherein the second portion of the electrically conductive material contacts both the substrate and the cap.
14. The packaged micromechanical resonator of claim 1 , wherein the micromechanical resonator comprises a piezoelectric material, wherein the cap includes one or more thru vias formed therein, and wherein the first portion of the electrically conductive material and the second portion of the electrically conductive material are arranged in a side-by-side configuration.
15. The packaged micromechanical resonator of claim 14 , wherein the micromechanical resonator is configured to support Lamb waves.
16. The packaged micromechanical resonator of claim 1 , wherein the micromechanical resonator comprises a piezoelectric material, wherein the cap includes one or more thru vias formed therein, and wherein the first portion of the electrically conductive material and the second portion of the electrically conductive material are disposed within a same plane.
17. The packaged micromechanical resonator of claim 16 , wherein the micromechanical resonator is configured to support Lamb waves.